Issued Patents All Time
Showing 25 most recent of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12305283 | Dithering or dynamic offsets for improved uniformity | Sanjeev Baluja, Michael R. Rice, Arkaprava Dan, Hanhong Chen | 2025-05-20 |
| 12119221 | PEALD nitride films | Hanhong Chen, Philip Allan Kraus | 2024-10-15 |
| 12077861 | Dithering or dynamic offsets for improved uniformity | Sanjeev Baluja, Michael R. Rice, Arkaprava Dan, Hanhong Chen | 2024-09-03 |
| 12060638 | Deposition apparatus and methods using staggered pumping locations | Sanjeev Baluja, Ashutosh Agarwal | 2024-08-13 |
| 11978625 | Methods of forming metal nitride films | — | 2024-05-07 |
| 11923233 | Dual-function wafer backside pressure control and edge purge | Tejas Ulavi | 2024-03-05 |
| 11894257 | Single wafer processing environments with spatial separation | Michael R. Rice, Sanjeev Baluja, Mandyam Sriram | 2024-02-06 |
| 11823870 | PEALD titanium nitride with direct microwave plasma | Hanhong Chen, Arkaprava Dan, Kyoung Ha Kim, Philip Allan Kraus | 2023-11-21 |
| 11791136 | Deposition radial and edge profile tunability through independent control of TEOS flow | Sanjeev Baluja, Yi Yang, Truong Van Nguyen, Nattaworn Boss Nunta, Tuan Nguyen +1 more | 2023-10-17 |
| 11761083 | Methods for controlling a flow pulse shape | Kevin Griffin, Hanhong Chen | 2023-09-19 |
| 11713508 | Apparatus and methods for improving chemical utilization rate in deposition process | Kevin Griffin, Sanjeev Baluja, Mario D. Silvetti, Hari Ponnekanti | 2023-08-01 |
| 11670489 | Modular microwave source with embedded ground surface | James D. Carducci, Larry D. Elizaga, Richard Fovell, Philip Allan Kraus, Thai Cheng Chua | 2023-06-06 |
| 11626281 | PEALD nitride films | Hanhong Chen, Philip Allan Kraus | 2023-04-11 |
| 11584993 | Thermally uniform deposition station | Jared Ahmad Lee, Sanjeev Baluja, Kenneth Brian Doering, Dhritiman Subha Kashyap, Kartik Shah | 2023-02-21 |
| 11583816 | Gas distribution plate for thermal deposition | Jared Ahmad Lee, Sanjeev Baluja, Dhritiman Subha Kashyap, Michael R. Rice | 2023-02-21 |
| 11586789 | Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity | Dhritiman Subha Kashyap, Chaowei Wang, Kartik Shah, Kevin Griffin, Karthik Ramanathan +2 more | 2023-02-21 |
| 11560624 | Precursor delivery system | — | 2023-01-24 |
| 11520358 | Gas-pulsing-based shared precursor distribution system and methods of use | Michael R. Rice, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez, Ming Xu +4 more | 2022-12-06 |
| 11479855 | Spatial wafer processing with improved temperature uniformity | Sanjeev Baluja, Dhritiman Subha Kashyap, Jared Ahmad Lee, Tejas Ulavi, Michael R. Rice | 2022-10-25 |
| 11396703 | Apparatus and methods for improving chemical utilization rate in deposition process | Kevin Griffin, Sanjeev Baluja, Mario David Silvetti, Hari Ponnekanti | 2022-07-26 |
| 11220747 | Complementary pattern station designs | Sanjeev Baluja, Michael R. Rice, Arkaprava Dan, Hanhong Chen | 2022-01-11 |
| 11169547 | Gas-pulsing-based shared precursor distribution system and methods of use | Michael R. Rice, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez, Ming Xu +4 more | 2021-11-09 |
| 11110425 | Gas distribution plate for thermal deposition | Jared Ahmad Lee, Sanjeev Baluja, Dhritiman Subha Kashyap, Michael R. Rice | 2021-09-07 |
| 11049694 | Modular microwave source with embedded ground surface | James D. Carducci, Larry D. Elizaga, Richard Fovell, Philip Allan Kraus, Thai Cheng Chua | 2021-06-29 |
| 11017986 | Deposition radial and edge profile tunability through independent control of TEOS flow | Sanjeev Baluja, Yi Yang, Truong Van Nguyen, Nattaworn Boss Nunta, Tuan Nguyen +1 more | 2021-05-25 |