Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12305283 | Dithering or dynamic offsets for improved uniformity | Joseph AuBuchon, Sanjeev Baluja, Michael R. Rice, Hanhong Chen | 2025-05-20 |
| 12077861 | Dithering or dynamic offsets for improved uniformity | Joseph AuBuchon, Sanjeev Baluja, Michael R. Rice, Hanhong Chen | 2024-09-03 |
| 11823870 | PEALD titanium nitride with direct microwave plasma | Hanhong Chen, Joseph AuBuchon, Kyoung Ha Kim, Philip Allan Kraus | 2023-11-21 |
| 11791172 | Methods of controlling gas pressure in gas-pulsing-based precursor distribution systems | Mauro Cimino, Paul Z. Wirth | 2023-10-17 |
| 11791190 | Apparatus and methods for real-time wafer chucking detection | Tejas Ulavi, Mike Murtagh, Sanjeev Baluja | 2023-10-17 |
| 11646226 | Method of tuning film properties of metal nitride using plasma | Wenyi Liu, Wei V. Tang, Srinivas Gandikota, Yixiong Yang, Yong Wu +2 more | 2023-05-09 |
| 11623253 | In-situ DC plasma for cleaning pedestal heater | Tejas Ulavi, Sanjeev Baluja, Wei V. Tang | 2023-04-11 |
| 11599069 | Method for auto-tuning and process performance assessment of chamber control | Mauro Cimino, Sanjeev Baluja | 2023-03-07 |
| 11260432 | In-situ DC plasma for cleaning pedestal heater | Tejas Ulavi, Sanjeev Baluja, Wei V. Tang | 2022-03-01 |
| 11220747 | Complementary pattern station designs | Joseph AuBuchon, Sanjeev Baluja, Michael R. Rice, Hanhong Chen | 2022-01-11 |