Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791172 | Methods of controlling gas pressure in gas-pulsing-based precursor distribution systems | Arkaprava Dan, Paul Z. Wirth | 2023-10-17 |
| 11599069 | Method for auto-tuning and process performance assessment of chamber control | Arkaprava Dan, Sanjeev Baluja | 2023-03-07 |
| 11533783 | Multi-zone heater model-based control in semiconductor manufacturing | Don Channa Kaluarachchi, Son M. Phi, Ramyashree Vishnuprasad, Dmitry Lubomirsky | 2022-12-20 |