| D1104086 |
Gas distribution plate |
Dhritiman Subha Kashyap, Chong Wang, Prahallad Iyengar, Kartik Shah, Joseph AuBuchon |
2025-12-02 |
|
| D1103948 |
Gas distribution plate |
Dhritiman Subha Kashyap, Chong Wang, Prahallad Iyengar, Kartik Shah, Joseph AuBuchon |
2025-12-02 |
|
| 12469739 |
Methods of operating a spatial deposition tool |
Joseph AuBuchon, Michael R. Rice, Arnab Dan, Haojiang Chen |
2025-11-11 |
|
| 12442080 |
Plasma showerhead assembly and method of reducing defects |
Haojiang Chen, Kenneth Brian Doering, Chitsan Lin, Kevin Griffin, Joseph AuBuchon +3 more |
2025-10-14 |
|
| 12398808 |
High conductance variable orifice valve |
Muhannad Mustafa |
2025-08-26 |
|
| D1085029 |
Gas distribution plate |
Prahallad Iyengar, Chaowei Wang, Kartik Shah, Janisht Golcha |
2025-07-22 |
|
| D1080812 |
Gas mixer |
Youngki Chang, Dhritiman Subha Kashyap, Rakesh Ramadas, Ashutosh Agarwal, Shashidhara Patel H B +1 more |
2025-06-24 |
|
| 12305283 |
Dithering or dynamic offsets for improved uniformity |
Joseph AuBuchon, Michael R. Rice, Arkaprava Dan, Hanhong Chen |
2025-05-20 |
|
| 12305284 |
Apparatus and methods for fine planar non-uniformity improvement |
Muhannad Mustafa, Mario D. Silvetti, Mandyam Sriram |
2025-05-20 |
|
| D1071103 |
Gas distribution plate |
Prahallad Iyengar, Janisht Golcha, Kartik Shah, Chaowei Wang |
2025-04-15 |
|
| 12276344 |
Self-adjustable variable orifice check valve for back pressure reduction |
Muhannad Mustafa |
2025-04-15 |
|
| 12224195 |
Centering wafer for processing chamber |
Muhannad Mustafa |
2025-02-11 |
|
| 12183618 |
Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool |
Tejas Ulavi, Eric J. Hoffmann, Ashutosh Agarwal |
2024-12-31 |
$49,330,000 |
| 12087555 |
Method and system for cleaning a process chamber |
Kalyanjit Ghosh, Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou, Amit Kumar BANSAL |
2024-09-10 |
$81,152,000 |
| 12077861 |
Dithering or dynamic offsets for improved uniformity |
Joseph AuBuchon, Michael R. Rice, Arkaprava Dan, Hanhong Chen |
2024-09-03 |
$44,731,000 |
| 12060638 |
Deposition apparatus and methods using staggered pumping locations |
Joseph AuBuchon, Ashutosh Agarwal |
2024-08-13 |
$69,975,000 |
| D1037778 |
Gas distribution plate |
Ashutosh Agarwal, Eric J. Hoffmann, Dhritiman Subha Kashyap, Kartik Shah, Amit Rajendra Sherekar |
2024-08-06 |
|
| 12057333 |
Metrology slot plates |
Kenneth Brian Doering, Vivek Shah, Ashutosh Agarwal, Shrihari Sampathkumar, Chunlei Zhang |
2024-08-06 |
$90,312,000 |
| 12020957 |
Heater assembly with process gap control for batch processing chambers |
Akshay Gunaji, Tejas Ulavi |
2024-06-25 |
$57,214,000 |
| 12018376 |
Apparatus and methods for motor shaft and heater leveling |
Ashutosh Agarwal, Tejas Ulavi |
2024-06-25 |
$57,214,000 |
| 11950384 |
Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers |
Akshay Gunaji, Uday Pai, Timothy J. Roggenbuck, Kalesh Panchaxari Karadi, Tejas Ulavi |
2024-04-02 |
$42,223,000 |
| 11923172 |
Paired dynamic parallel plate capacitively coupled plasmas |
Hari Ponnekanti, Tsutomu Tanaka, Mandyam Sriram, Dmitry A. Dzilno, Mario David Silvetti |
2024-03-05 |
$73,319,000 |
| 11894257 |
Single wafer processing environments with spatial separation |
Michael R. Rice, Joseph AuBuchon, Mandyam Sriram |
2024-02-06 |
$39,056,000 |
| 11818810 |
Heater assembly with purge gap control and temperature uniformity for batch processing chambers |
Dhritiman Subha Kashyap, Amit Rajendra Sherekar, Kartik Shah, Ashutosh Agarwal, Eric J. Hoffmann +1 more |
2023-11-14 |
$33,075,000 |
| 11791136 |
Deposition radial and edge profile tunability through independent control of TEOS flow |
Yi Yang, Truong Van Nguyen, Nattaworn Boss Nunta, Joseph AuBuchon, Tuan Nguyen +1 more |
2023-10-17 |
$42,568,000 |
