Issued Patents All Time
Showing 25 most recent of 100 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398808 | High conductance variable orifice valve | Muhannad Mustafa | 2025-08-26 |
| D1085029 | Gas distribution plate | Prahallad Iyengar, Chaowei Wang, Kartik Shah, Janisht Golcha | 2025-07-22 |
| D1080812 | Gas mixer | Youngki Chang, Dhritiman Subha Kashyap, Rakesh Ramadas, Ashutosh Agarwal, Shashidhara Patel H B +1 more | 2025-06-24 |
| 12305283 | Dithering or dynamic offsets for improved uniformity | Joseph AuBuchon, Michael R. Rice, Arkaprava Dan, Hanhong Chen | 2025-05-20 |
| 12305284 | Apparatus and methods for fine planar non-uniformity improvement | Muhannad Mustafa, Mario D. Silvetti, Mandyam Sriram | 2025-05-20 |
| D1071103 | Gas distribution plate | Prahallad Iyengar, Janisht Golcha, Kartik Shah, Chaowei Wang | 2025-04-15 |
| 12276344 | Self-adjustable variable orifice check valve for back pressure reduction | Muhannad Mustafa | 2025-04-15 |
| 12224195 | Centering wafer for processing chamber | Muhannad Mustafa | 2025-02-11 |
| 12183618 | Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool | Tejas Ulavi, Eric J. Hoffmann, Ashutosh Agarwal | 2024-12-31 |
| 12087555 | Method and system for cleaning a process chamber | Kalyanjit Ghosh, Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou, Amit Kumar BANSAL | 2024-09-10 |
| 12077861 | Dithering or dynamic offsets for improved uniformity | Joseph AuBuchon, Michael R. Rice, Arkaprava Dan, Hanhong Chen | 2024-09-03 |
| 12060638 | Deposition apparatus and methods using staggered pumping locations | Joseph AuBuchon, Ashutosh Agarwal | 2024-08-13 |
| D1037778 | Gas distribution plate | Ashutosh Agarwal, Eric J. Hoffmann, Dhritiman Subha Kashyap, Kartik Shah, Amit Rajendra Sherekar | 2024-08-06 |
| 12057333 | Metrology slot plates | Kenneth Brian Doering, Vivek Shah, Ashutosh Agarwal, Shrihari Sampathkumar, Chunlei Zhang | 2024-08-06 |
| 12020957 | Heater assembly with process gap control for batch processing chambers | Akshay Gunaji, Tejas Ulavi | 2024-06-25 |
| 12018376 | Apparatus and methods for motor shaft and heater leveling | Ashutosh Agarwal, Tejas Ulavi | 2024-06-25 |
| 11950384 | Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers | Akshay Gunaji, Uday Pai, Timothy J. Roggenbuck, Kalesh Panchaxari Karadi, Tejas Ulavi | 2024-04-02 |
| 11923172 | Paired dynamic parallel plate capacitively coupled plasmas | Hari Ponnekanti, Tsutomu Tanaka, Mandyam Sriram, Dmitry A. Dzilno, Mario David Silvetti | 2024-03-05 |
| 11894257 | Single wafer processing environments with spatial separation | Michael R. Rice, Joseph AuBuchon, Mandyam Sriram | 2024-02-06 |
| 11818810 | Heater assembly with purge gap control and temperature uniformity for batch processing chambers | Dhritiman Subha Kashyap, Amit Rajendra Sherekar, Kartik Shah, Ashutosh Agarwal, Eric J. Hoffmann +1 more | 2023-11-14 |
| 11791136 | Deposition radial and edge profile tunability through independent control of TEOS flow | Yi Yang, Truong Van Nguyen, Nattaworn Boss Nunta, Joseph AuBuchon, Tuan Nguyen +1 more | 2023-10-17 |
| 11791190 | Apparatus and methods for real-time wafer chucking detection | Tejas Ulavi, Arkaprava Dan, Mike Murtagh | 2023-10-17 |
| 11769684 | Wafer heater with backside and integrated bevel purge | Tejas Ulavi, Vijay D. Parkhe, Naveen Kumar Nagaraja, Surajit Kumar, Dhritiman Subha Kashyap +1 more | 2023-09-26 |
| 11746417 | Clean isolation valve for reduced dead volume | Ashutosh Agarwal | 2023-09-05 |
| 11713508 | Apparatus and methods for improving chemical utilization rate in deposition process | Kevin Griffin, Joseph AuBuchon, Mario D. Silvetti, Hari Ponnekanti | 2023-08-01 |