Gas distribution plate

Assignee

• Applied Materials

Inventors

• Ashutosh Agarwal (36 patents)
• Eric J. Hoffmann (4 patents)
• Dhritiman Subha Kashyap (21 patents)
• Kartik Shah (68 patents)
• Amit Rajendra Sherekar (2 patents)
• Sanjeev Baluja (104 patents)

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