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Thermal processing susceptor |
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| 12371776 |
Overlap susceptor and preheat ring |
Zhepeng CONG, Schubert S. Chu, Nyi O. Myo, Zhiyuan Ye, Richard O. Collins |
2025-07-29 |
| D1085029 |
Gas distribution plate |
Prahallad Iyengar, Chaowei Wang, Janisht Golcha, Sanjeev Baluja |
2025-07-22 |
| 12340980 |
Plasma showerhead with improved uniformity |
Chaowei Wang, Kenneth Brian Doering, Hanhong Chen, Kevin Griffin, Hao Zhang |
2025-06-24 |
| 12324061 |
Epitaxial deposition chamber |
Shu-Kwan LAU, Brian H. Burrows, Zhiyuan Ye, Richard O. Collins, Enle CHOO +5 more |
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| 12308218 |
Thermal shield for processing chamber |
Youngki Chang, Muhannad Mustafa, Dhritiman Subha Kashyap, Dhivanraj Subramanian |
2025-05-20 |
| D1071103 |
Gas distribution plate |
Prahallad Iyengar, Janisht Golcha, Chaowei Wang, Sanjeev Baluja |
2025-04-15 |
| 12228905 |
Eco-efficiency monitoring and exploration platform for semiconductor manufacturing |
Ala Moradian, Umesh M. Kelkar, Elizabeth Neville, Orlando Trejo, Sergey Meirovich +1 more |
2025-02-18 |
| 12183559 |
Apparatus for temperature control in a substrate processing chamber |
Vishwas Kumar Pandey, Colin John Dickinson, Dinkesh HUDERI SOMANNA, Ala Moradian |
2024-12-31 |
| 12183553 |
Baffle implementation for improving bottom purge gas flow uniformity |
Nitin Pathak, Amit Kumar BANSAL, Tuan Nguyen, Juan Carlos Rocha, David Blahnik |
2024-12-31 |
| 12139790 |
Processing system and method of delivering a reactant gas |
Vishwas Kumar Pandey, Christopher S. Olsen, Rene George, Eric Kihara Shono, Lara Hawrylchak +3 more |
2024-11-12 |
| 12091749 |
Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet |
Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Manjunath Subbanna, Ala Moradian +4 more |
2024-09-17 |
| 12060651 |
Chamber architecture for epitaxial deposition and advanced epitaxial film applications |
Tetsuya Ishikawa, Swaminathan Srinivasan, Ala Moradian, Manjunath Subbanna, Matthias Bauer +2 more |
2024-08-13 |
| D1037778 |
Gas distribution plate |
Ashutosh Agarwal, Eric J. Hoffmann, Dhritiman Subha Kashyap, Amit Rajendra Sherekar, Sanjeev Baluja |
2024-08-06 |
| 12018372 |
Gas injector for epitaxy and CVD chamber |
Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Ala Moradian, Manjunath Subbanna +4 more |
2024-06-25 |
| 12001197 |
Eco-efficiency (sustainability) dashboard for semiconductor manufacturing |
Ala Moradian, Elizabeth Neville, Umesh M. Kelkar, Mark Denome, Prashanth Kothnur +3 more |
2024-06-04 |
| 11978646 |
Thermal chamber with improved thermal uniformity |
Dongming Iu, Norman L. Tam, Matthew Spuller, Jau-Jiun CHEN, Kong CHAN +4 more |
2024-05-07 |
| 11959169 |
Asymmetric injection for better wafer uniformity |
Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Tobin Kaufman-Osborn +3 more |
2024-04-16 |
| 11885021 |
Gas supply member with baffle |
Vishwas Kumar Pandey, Kailash Pradhan, Sairaju Tallavarjula, Rene George, Eric Kihara Shono +2 more |
2024-01-30 |
| 11848226 |
Thermal processing susceptor |
Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more |
2023-12-19 |
| 11835927 |
Reducing substrate surface scratching using machine learning |
Satish Radhakrishnan, Karthik Ramanathan, Karthikeyan Balaraman, Adolph Miller Allen, Xinyuan Chong +5 more |
2023-12-05 |
| 11818810 |
Heater assembly with purge gap control and temperature uniformity for batch processing chambers |
Dhritiman Subha Kashyap, Amit Rajendra Sherekar, Ashutosh Agarwal, Eric J. Hoffmann, Sanjeev Baluja +1 more |
2023-11-14 |
| 11810766 |
Protection of aluminum process chamber components |
Karthikeyan Balaraman, Sathyanarayana Bindiganavale, Rajasekhar PATIBANDLA, Balamurugan Ramasamy, Umesh M. Kelkar +3 more |
2023-11-07 |
| 11807931 |
Chamber injector |
Shu-Kwan LAU, Lit Ping LAM, Preetham Rao, Ian Ong, Nyi O. Myo +1 more |
2023-11-07 |
| 11781212 |
Overlap susceptor and preheat ring |
Zhepeng CONG, Schubert S. Chu, Nyi O. Myo, Zhiyuan Ye, Richard O. Collins |
2023-10-10 |
