| 11732355 |
Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber |
Vishwas Kumar Pandey, Eric Kihara Shono, Christopher S. Olsen, Agus Sofian Tjandra, Tobin Kaufman-Osborn +2 more |
2023-08-22 |
| 11735447 |
Enhanced process and hardware architecture to detect and correct realtime product substrates |
Kartik Santhanam, Wolfgang Aderhold, Martin A. Hilkene, Stephen Moffatt |
2023-08-22 |
| 11591689 |
Method for fabricating chamber parts |
Mats Larsson, Kevin A. PAPKE, Chirag Shaileshbhai KHAIRNAR, Rajasekhar PATIBANDLA, Karthikeyan Balaraman +2 more |
2023-02-28 |
| 11586160 |
Reducing substrate surface scratching using machine learning |
Satish Radhakrishnan, Karthik Ramanathan, Karthikeyan Balaraman, Adolph Miller Allen, Xinyuan Chong +5 more |
2023-02-21 |
| 11586789 |
Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity |
Dhritiman Subha Kashyap, Chaowei Wang, Kevin Griffin, Karthik Ramanathan, Hanhong Chen +2 more |
2023-02-21 |
| 11584993 |
Thermally uniform deposition station |
Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Kenneth Brian Doering, Dhritiman Subha Kashyap |
2023-02-21 |
| 11549183 |
Showerhead with inlet mixer |
Ashutosh Agarwal, Sanjeev Baluja, Dhritiman Subha Kashyap, Yanjun Xia |
2023-01-10 |
| 11529592 |
Gas injector with baffle |
Vishwas Kumar Pandey, Lara Hawrylchak, Eric Kihara Shono, Christopher S. Olsen, Sairaju Tallavarjula +4 more |
2022-12-20 |
| 11515129 |
Radiation shield modification for improving substrate temperature uniformity |
Elizabeth Neville, Satish Radhakrishnan, Vinay Prabhakar, Venkata Sharat Chandra Parimi, Sungwon Ha |
2022-11-29 |
| 11501954 |
Dogbone inlet cone profile for remote plasma oxidation chamber |
Vishwas Kumar Pandey, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more |
2022-11-15 |
| 11492704 |
Chamber injector |
Shu-Kwan LAU, Lit Ping LAM, Preetham Rao, Ian Ong, Nyi O. Myo +1 more |
2022-11-08 |
| 11486038 |
Asymmetric injection for better wafer uniformity |
Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Tobin Kaufman-Osborn +3 more |
2022-11-01 |
| D959490 |
Display screen or portion thereof with graphical user interface |
Kartik Santhanam, Bindusagar Marath Sankarathodi, Abhilash J. Mayur, Dayal Ramachandran, Amritha Rammohan +2 more |
2022-08-02 |
| 11239058 |
Protective layers for processing chamber components |
Karthikeyan Balaraman, Balamurugan Ramasamy, Mats Larsson, Kevin A. PAPKE, Rajasekhar PATIBANDLA +2 more |
2022-02-01 |
| 11171023 |
Diode laser for wafer heating for EPI processes |
Schubert S. Chu, Douglas E. Holmgren, Palamurali GAJENDRA, Nyi O. Myo, Preetham Rao +5 more |
2021-11-09 |
| 11124878 |
Gas supply member with baffle |
Vishwas Kumar Pandey, Kailash Pradhan, Sairaju Tallavarjula, Rene George, Eric Kihara Shono +2 more |
2021-09-21 |
| 11077410 |
Gas injector with baffle |
Vishwas Kumar Pandey, Lara Hawrylchak, Eric Kihara Shono, Christopher S. Olsen, Sairaju Tallavarjula +4 more |
2021-08-03 |
| 11049696 |
Dogbone inlet cone profile for remote plasma oxidation chamber |
Vishwas Kumar Pandey, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more |
2021-06-29 |
| 11021790 |
Liner for processing chamber |
Zhepeng CONG, Schubert S. Chu, Nyi O. Myo, Surajit Kumar |
2021-06-01 |
| 11021794 |
Graphite susceptor |
Preetham Rao, Subramani Iyer, Mehran Behdjat |
2021-06-01 |
| 10995419 |
Methods and apparatus for gallium nitride deposition |
Brian H. Burrows, Ala Moradian, Shu-Kwan LAU |
2021-05-04 |
| 10930543 |
Thermal processing susceptor |
Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more |
2021-02-23 |
| 10808310 |
Effective and novel design for lower particle count and better wafer quality by diffusing the flow inside the chamber |
Vishwas Kumar Pandey, Edric Tong, Prashanth Vasudeva |
2020-10-20 |
| 10697061 |
Two zone flow cooling plate design with concentric or spiral channel for efficient gas distribution assembly cooling |
Nisha Prakash Holla, Vijaykumar Krithivasan, Anantha K. Subramani, Hamid Noorbakhsh |
2020-06-30 |
| 10636626 |
Dogbone inlet cone profile for remote plasma oxidation chamber |
Vishwas Kumar Pandey, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more |
2020-04-28 |
