Issued Patents All Time
Showing 25 most recent of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125688 | L-motion slit door for substrate processing chamber | James Rogers | 2024-10-22 |
| 11551960 | Helical plug for reduction or prevention of arcing in a substrate support | Reyn Tetsuro WAKABAYASHI, Anwar Husain | 2023-01-10 |
| 11488806 | L-motion slit door for substrate processing chamber | — | 2022-11-01 |
| 11488852 | Methods and apparatus for reducing high voltage arcing in semiconductor process chambers | Anwar Husain, Kartik Ramaswamy | 2022-11-01 |
| 11424096 | Temperature controlled secondary electrode for ion control at substrate edge | Kartik Ramaswamy, Anwar Husain | 2022-08-23 |
| 11384838 | Seal member | Ippei Nakagawa, Nobuhiro Yoshida | 2022-07-12 |
| 11171030 | Methods and apparatus for dechucking wafers | Anwar Husain, Haitao Wang, Sergio Fukuda Shoji | 2021-11-09 |
| 11130142 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Vladimir Knyazik, Jason C. Della Rosa, Zheng John Ye, Jennifer Y. Sun +1 more | 2021-09-28 |
| 10954595 | High power showerhead with recursive gas flow distribution | Xiaoping Zhou | 2021-03-23 |
| 10943808 | Ceramic electrostatic chuck having a V-shape seal band | Ippei Nakagawa, Nobuhiro Yoshida | 2021-03-09 |
| 10930540 | Electrostatic chuck assembly having a dielectric filler | Kartik Ramaswamy, Anwar Husain, Haitao Wang, Evans Lee, Jaeyong Cho +3 more | 2021-02-23 |
| 10886107 | Extended detachable gas distribution plate and showerhead incorporating same | Xiaoping Zhou | 2021-01-05 |
| 10854425 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Yashaswini B. Pattar +7 more | 2020-12-01 |
| 10847347 | Edge ring assembly for a substrate support in a plasma processing chamber | Anwar Husain, Reyn Tetsuro WAKABAYASHI | 2020-11-24 |
| 10790120 | Showerhead having a detachable high resistivity gas distribution plate | Jason C. Della Rosa, Vladimir Knyazik, Jisoo Kim, Wonseok Lee, Usama Dadu | 2020-09-29 |
| 10745807 | Showerhead with reduced backside plasma ignition | Haitao Wang, Chunlei Zhang, Sergio Fukuda Shoji, Kartik Ramaswamy, Roland Smith +1 more | 2020-08-18 |
| 10697061 | Two zone flow cooling plate design with concentric or spiral channel for efficient gas distribution assembly cooling | Kartik Shah, Nisha Prakash Holla, Vijaykumar Krithivasan, Anantha K. Subramani | 2020-06-30 |
| 10636629 | Split slit liner door | Reyn Tetsuro WAKABAYASHI | 2020-04-28 |
| 10625277 | Showerhead having a detachable gas distribution plate | Dmitry Lubomirsky, Vladimir Knyazik, Jason C. Della Rosa, Zheng John Ye, Jennifer Y. Sun +1 more | 2020-04-21 |
| 10607816 | Showerhead having a detachable high resistivity gas distribution plate | Jason C. Della Rosa, Vladimir Knyazik, Jisoo Kim, Wonseok Lee, Usama Dadu | 2020-03-31 |
| 10504765 | Electrostatic chuck assembly having a dielectric filler | Kartik Ramaswamy, Anwar Husain, Haitao Wang, Evans Lee, Jaeyong Cho +3 more | 2019-12-10 |
| 10378108 | Showerhead with reduced backside plasma ignition | Haitao Wang, Chunlei Zhang, Sergio Fukuda Shoji, Kartik Ramaswamy, Roland Smith +1 more | 2019-08-13 |
| 10373810 | Showerhead having an extended detachable gas distribution plate | Xiaoping Zhou | 2019-08-06 |
| 10304715 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Konstantin Makhratchev, Jason Della Rosa, Brad L. Mays, Douglas A. Buchberger, Jr. | 2019-05-28 |
| 10177050 | Methods and apparatus for controlling substrate uniformity | S. M. Reza Sadjadi, Dmitry Lubomirsky, John Zheng Ye, David H. Quach, Sean S. Kang | 2019-01-08 |