Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12155930 | Infrared and visible imaging system for monitoring equipment | Leo Francis Casey, Peter Light, Joel Fraser Atwater, Crystal Elayna Winston, Mehrdad Roosta +1 more | 2024-11-26 |
| 11902655 | Infrared and visible imaging system for monitoring equipment | Leo Francis Casey, Peter Light, Joel Fraser Atwater, Crystal Elayna Winston, Mehrdad Roosta +1 more | 2024-02-13 |
| 11595561 | Infrared and visible imaging system | Leo Francis Casey, Peter Light, Joel Fraser Atwater, Crystal Elayna Winston, Mehrdad Roosta +1 more | 2023-02-28 |
| 11373396 | Systems and methods for improved feature extraction using polarization information | Jingjin Xie, Christopher Ducote | 2022-06-28 |
| 11158528 | Component temperature control using a combination of proportional control valves and pulsed valves | — | 2021-10-26 |
| 10972649 | Infrared and visible imaging system for device identification and tracking | Leo Francis Casey, Peter Light, Joel Fraser Atwater, Crystal Elayna Winston, Mehrdad Roosta +1 more | 2021-04-06 |
| 10854425 | Feedforward temperature control for plasma processing apparatus | Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Yashaswini B. Pattar, Duy D. Nguyen +7 more | 2020-12-01 |
| 10578977 | On-board supply system for a stage assembly | Johnathan Agustin Marquez, Joseph P. Rossi | 2020-03-03 |
| 10256123 | Component temperature control using a combination of proportional control valves and pulsed valves | — | 2019-04-09 |
| 9921495 | Magnetic sensor calibration and servo for planar motor stage | Pai-Hsueh Yang, Michael Binnard, J. Kyle Wells, Tsutomu Ogiwara | 2018-03-20 |
| 9904178 | On-board supply system for a stage assembly | Johnathan Agustin Marquez, Joseph P. Rossi | 2018-02-27 |
| 9778579 | System and method for controlling a temperature of a reaction assembly | Michel Pharand, Michael Binnard | 2017-10-03 |
| 9639097 | Component temperature control by coolant flow control and heater duty cycle control | Kartik Ramaswamy, Bryan Liao, Sergio Fukuda Shoji, Duy D. Nguyen, Hamid Noorbakhsh +1 more | 2017-05-02 |
| 9338871 | Feedforward temperature control for plasma processing apparatus | Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Yashaswini B. Pattar, Duy D. Nguyen +7 more | 2016-05-10 |
| 9214315 | Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow | Fernando Silveira, Hamid Tavassoli, Xiaoping Zhou, Shane C. Nevil, Douglas A. Buchberger, Jr. +5 more | 2015-12-15 |
| 9165804 | Methods of cooling process chamber components | — | 2015-10-20 |
| 8916793 | Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow | Fernando Silveira, Hamid Tavassoli, Xiaoping Zhou, Shane C. Nevil, Douglas A. Buchberger, Jr. +5 more | 2014-12-23 |
| 8880227 | Component temperature control by coolant flow control and heater duty cycle control | Kartik Ramaswamy, Bryan Liao, Sergio Fukuda Shoji, Duy D. Nguyen, Hamid Noorbakhsh +1 more | 2014-11-04 |
| 8608852 | Temperature controlled plasma processing chamber component with zone dependent thermal efficiencies | Kallol Bera, Larry D. Elizaga | 2013-12-17 |