| 12155930 |
Infrared and visible imaging system for monitoring equipment |
Leo Francis Casey, Peter Light, Joel Fraser Atwater, Crystal Elayna Winston, Mehrdad Roosta +1 more |
2024-11-26 |
$103,833,000 |
| 11902655 |
Infrared and visible imaging system for monitoring equipment |
Leo Francis Casey, Peter Light, Joel Fraser Atwater, Crystal Elayna Winston, Mehrdad Roosta +1 more |
2024-02-13 |
$89,356,000 |
| 11595561 |
Infrared and visible imaging system |
Leo Francis Casey, Peter Light, Joel Fraser Atwater, Crystal Elayna Winston, Mehrdad Roosta +1 more |
2023-02-28 |
$65,971,000 |
| 11373396 |
Systems and methods for improved feature extraction using polarization information |
Jingjin Xie, Christopher Ducote |
2022-06-28 |
$74,298,000 |
| 11158528 |
Component temperature control using a combination of proportional control valves and pulsed valves |
— |
2021-10-26 |
$68,163,000 |
| 10972649 |
Infrared and visible imaging system for device identification and tracking |
Leo Francis Casey, Peter Light, Joel Fraser Atwater, Crystal Elayna Winston, Mehrdad Roosta +1 more |
2021-04-06 |
$85,884,000 |
| 10854425 |
Feedforward temperature control for plasma processing apparatus |
Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Yashaswini B. Pattar, Duy D. Nguyen +7 more |
2020-12-01 |
$39,153,000 |
| 10578977 |
On-board supply system for a stage assembly |
Johnathan Agustin Marquez, Joseph P. Rossi |
2020-03-03 |
|
| 10256123 |
Component temperature control using a combination of proportional control valves and pulsed valves |
— |
2019-04-09 |
$19,096,000 |
| 9921495 |
Magnetic sensor calibration and servo for planar motor stage |
Pai-Hsueh Yang, Michael Binnard, J. Kyle Wells, Tsutomu Ogiwara |
2018-03-20 |
|
| 9904178 |
On-board supply system for a stage assembly |
Johnathan Agustin Marquez, Joseph P. Rossi |
2018-02-27 |
|
| 9778579 |
System and method for controlling a temperature of a reaction assembly |
Michel Pharand, Michael Binnard |
2017-10-03 |
|
| 9639097 |
Component temperature control by coolant flow control and heater duty cycle control |
Kartik Ramaswamy, Bryan Liao, Sergio Fukuda Shoji, Duy D. Nguyen, Hamid Noorbakhsh +1 more |
2017-05-02 |
$24,975,000 |
| 9338871 |
Feedforward temperature control for plasma processing apparatus |
Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Yashaswini B. Pattar, Duy D. Nguyen +7 more |
2016-05-10 |
$10,962,000 |
| 9214315 |
Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow |
Fernando Silveira, Hamid Tavassoli, Xiaoping Zhou, Shane C. Nevil, Douglas A. Buchberger, Jr. +5 more |
2015-12-15 |
$14,629,000 |
| 9165804 |
Methods of cooling process chamber components |
— |
2015-10-20 |
$10,064,000 |
| 8916793 |
Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow |
Fernando Silveira, Hamid Tavassoli, Xiaoping Zhou, Shane C. Nevil, Douglas A. Buchberger, Jr. +5 more |
2014-12-23 |
$38,476,000 |
| 8880227 |
Component temperature control by coolant flow control and heater duty cycle control |
Kartik Ramaswamy, Bryan Liao, Sergio Fukuda Shoji, Duy D. Nguyen, Hamid Noorbakhsh +1 more |
2014-11-04 |
$12,728,000 |
| 8608852 |
Temperature controlled plasma processing chamber component with zone dependent thermal efficiencies |
Kallol Bera, Larry D. Elizaga |
2013-12-17 |
$19,424,000 |
