Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9639097 | Component temperature control by coolant flow control and heater duty cycle control | Chetan Mahadeswaraswamy, Kartik Ramaswamy, Sergio Fukuda Shoji, Duy D. Nguyen, Hamid Noorbakhsh +1 more | 2017-05-02 |
| 8962488 | Synchronized radio frequency pulsing for plasma etching | Katsumasa Kawasaki, Yashaswini B. Pattar, Sergio Fukuda Shoji, Duy D. Nguyen, Kartik Ramaswamy +3 more | 2015-02-24 |
| 8880227 | Component temperature control by coolant flow control and heater duty cycle control | Chetan Mahadeswaraswamy, Kartik Ramaswamy, Sergio Fukuda Shoji, Duy D. Nguyen, Hamid Noorbakhsh +1 more | 2014-11-04 |
| 8513889 | Methods and apparatus for tuning matching networks | Chunlei Zhang, Sergio Fukuda Shoji, Andrey Semenin, Kartik Ramaswamy, James P. Cruse | 2013-08-20 |
| 8404598 | Synchronized radio frequency pulsing for plasma etching | Katsumasa Kawasaki, Yashaswini B. Pattar, Sergio Fukuda Shoji, Duy D. Nguyen, Kartik Ramaswamy +3 more | 2013-03-26 |
| 8133819 | Plasma etching carbonaceous layers with sulfur-based etchants | Judy Wang, Shawming Ma, Chang-Lin Hsieh, Jie Zhou, Hun Sang Kim | 2012-03-13 |