Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500279 | Optical module and projection apparatus | Chien-Sheng Liu, Yu-Hao Chang, Yi Chang, Shu-Yu Lin | 2022-11-15 |
| 11240554 | HDMI apparatus using optical communication | Shao-Hung Lin, Che-Fu Liang | 2022-02-01 |
| 11039202 | HDMI apparatus using optical communication | Shao-Hung Lin, Che-Fu Liang | 2021-06-15 |
| 10630101 | Charging-discharging module of energy storage unit and charging-discharging method thereof | Yi-Ming Huang, Chien-Chung Lo, Wei-Chen Tu | 2020-04-21 |
| 8133819 | Plasma etching carbonaceous layers with sulfur-based etchants | Judy Wang, Shawming Ma, Bryan Liao, Jie Zhou, Hun Sang Kim | 2012-03-13 |
| 7585778 | Method of etching an organic low-k dielectric material | Binxi Gu | 2009-09-08 |
| 7244313 | Plasma etch and photoresist strip process with intervening chamber de-fluorination and wafer de-fluorination steps | Yifeng Zhou, Gerardo Delgadino | 2007-07-17 |
| 7071112 | BARC shaping for improved fabrication of dual damascene integrated circuit features | Qiqun Zhang, Jie Yuan, Terry Leung, Silvia Halim | 2006-07-04 |
| 6949203 | System level in-situ integrated dielectric etch process particularly useful for copper dual damascene | Diana Xiaobing Ma, Brian Sy-Yuan Shieh, Gerald Yin, Jennifer Y. Sun, Senh Thach +2 more | 2005-09-27 |
| 6905968 | Process for selectively etching dielectric layers | Jie Yuan, Hui Chen, Theodoros Panagopoulos, Yan Ye | 2005-06-14 |
| 6897154 | Selective etching of low-k dielectrics | Terry Leung, Qiqun Zheng, Yan Ye, Takehiko Komatsu | 2005-05-24 |
| 6762127 | Etch process for dielectric materials comprising oxidized organo silane materials | Yves Pierre Boiteux, Hui Chen, Ivano Gregoratto, Hoiman Hung, Sum-Yee Betty Tang | 2004-07-13 |
| 6607675 | Method of etching carbon-containing silicon oxide films | Hui Chen, Jie Yuan, Yan Ye | 2003-08-19 |
| 6559942 | Monitoring substrate processing with optical emission and polarized reflected radiation | Zhifeng Sui, Coriolan Frum, Jie Yuan | 2003-05-06 |
| 6547978 | Method of heating a semiconductor substrate | Yan Ye, Allen Zhao, Xiancan Deng, Diana Xiaobing Ma | 2003-04-15 |
| 6455431 | NH3 plasma descumming and resist stripping in semiconductor applications | Hui Chen, Jie Yuan, Yan Ye | 2002-09-24 |
| 6153530 | Post-etch treatment of plasma-etched feature surfaces to prevent corrosion | Yan Ye, Xiaoye Zhao, Xian-Can Deng, Wen-Chiang Tu, Chung-Fu Chu +1 more | 2000-11-28 |