Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7758763 | Plasma for resist removal and facet control of underlying features | Yifeng Zhou, Siyi Li, Michael D. Armacost | 2010-07-20 |
| 7071112 | BARC shaping for improved fabrication of dual damascene integrated circuit features | Chang-Lin Hsieh, Qiqun Zhang, Jie Yuan, Silvia Halim | 2006-07-04 |
| 6897154 | Selective etching of low-k dielectrics | Qiqun Zheng, Chang-Lin Hsieh, Yan Ye, Takehiko Komatsu | 2005-05-24 |