Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897154 | Selective etching of low-k dielectrics | Terry Leung, Chang-Lin Hsieh, Yan Ye, Takehiko Komatsu | 2005-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897154 | Selective etching of low-k dielectrics | Terry Leung, Chang-Lin Hsieh, Yan Ye, Takehiko Komatsu | 2005-05-24 |