Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897154 | Selective etching of low-k dielectrics | Terry Leung, Qiqun Zheng, Chang-Lin Hsieh, Yan Ye | 2005-05-24 |
| 6613689 | Magnetically enhanced plasma oxide etch using hexafluorobutadiene | Jingbao Liu, Hongqing Shan, Keji Horioka, Bryan Pu | 2003-09-02 |
| 6451703 | Magnetically enhanced plasma etch process using a heavy fluorocarbon etching gas | Jingbao Liu, Hongqing Shan, Keji Horioka, Bryan Pu | 2002-09-17 |
| 6403491 | Etch method using a dielectric etch chamber with expanded process window | Jingbao Liu, Judy Wang, Bryan Pu, Kenny L. Doan, Claes Bjorkman +4 more | 2002-06-11 |
| 6362109 | Oxide/nitride etching having high selectivity to photoresist | Yungsang Kim, Claes Bjorkman, Hongqing Shan | 2002-03-26 |