Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613689 | Magnetically enhanced plasma oxide etch using hexafluorobutadiene | Jingbao Liu, Takehiko Komatsu, Hongqing Shan, Bryan Pu | 2003-09-02 |
| 6451703 | Magnetically enhanced plasma etch process using a heavy fluorocarbon etching gas | Jingbao Liu, Takehiko Komatsu, Hongqing Shan, Bryan Pu | 2002-09-17 |