Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905624 | Interferometric endpoint detection in a substrate etching process | Zhifeng Sui, Hongqing Shan | 2005-06-14 |
| 6559942 | Monitoring substrate processing with optical emission and polarized reflected radiation | Zhifeng Sui, Jie Yuan, Chang-Lin Hsieh | 2003-05-06 |
| 6323647 | Motor driven tuning and matching of RF coils in an NMR probe | Weston A. Anderson, Howard D.W. Hill, David Humber | 2001-11-27 |