Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12296427 | Apparatus and method for CMP temperature control | Haosheng Wu, Shou-Sung Chang, Chih Chung Chou, Jianshe Tang, Hari Soundararajan +1 more | 2025-05-13 |
| 12243761 | Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging | Martin Jeffrey Salinas, Zhepeng CONG, Xinning LUAN, Ashur J. ATANOS | 2025-03-04 |
| 12030093 | Steam treatment stations for chemical mechanical polishing system | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Chih Chung Chou +2 more | 2024-07-09 |
| 11919123 | Apparatus and method for CMP temperature control | Surajit Kumar, Hari Soundararajan, Shou-Sung Chang | 2024-03-05 |
| 11865671 | Temperature-based in-situ edge assymetry correction during CMP | Haosheng Wu, Shou-Sung Chang, Jianshe Tang, Chih Chung Chou, Hari Soundararajan +1 more | 2024-01-09 |
| 11697187 | Temperature-based assymetry correction during CMP and nozzle for media dispensing | Haosheng Wu, Shou-Sung Chang, Jianshe Tang, Chih Chung, Hari Soundararajan +1 more | 2023-07-11 |
| 11633833 | Use of steam for pre-heating of CMP components | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Paul D. Butterfield +2 more | 2023-04-25 |
| 11628478 | Steam cleaning of CMP components | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Chih Chung Chou +2 more | 2023-04-18 |
| 11577358 | Gas entrainment during jetting of fluid for temperature control in chemical mechanical polishing | Surajit Kumar, Chih Chung Chou, Shou-Sung Chang | 2023-02-14 |
| 11446711 | Steam treatment stations for chemical mechanical polishing system | Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Chih Chung Chou +2 more | 2022-09-20 |
| 10256120 | Systems, methods and apparatus for post-chemical mechanical planarization substrate buff pre-cleaning | Clinton SAKATA, Jim K. Atkinson, Brian J. Brown, Jianshe Tang, Yufei Chen +1 more | 2019-04-09 |
| 10229842 | Double sided buff module for post CMP cleaning | Clinton SAKATA, Jim K. Atkinson, Tomohiko Kitajima, Brian J. Brown | 2019-03-12 |
| 9873179 | Carrier for small pad for chemical mechanical polishing | Steven M. Zuniga, Hung Chih Chen, Eric Lau, Garrett H. Sin, Shou-Sung Chang | 2018-01-23 |
| 9119461 | High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subassemblies, and assembly methods | Hung Chih Chen, Jim K. Atkinson, David Datong Huo | 2015-09-01 |
| 8968055 | Methods and apparatus for pre-chemical mechanical planarization buffing module | Allen L. D'Ambra, Jim K. Atkinson, Hung Chih Chen | 2015-03-03 |
| 8844546 | Apparatus and method for cleaning semiconductor substrate using pressurized fluid | Allen L. D'Ambra | 2014-09-30 |
| 8181302 | Brush alignment control mechanism | Hung Chih Chen, Dan Zhang | 2012-05-22 |
| 8101934 | Methods and apparatus for detecting a substrate notch or flat | Haochuan Zhang, Noel Manto | 2012-01-24 |
| 7962990 | Brush box cleaner module with force control | Joseph Yudovsky, Allen L. D'Ambra | 2011-06-21 |
| 7774887 | Scrubber box and methods for using the same | Joseph Yudovsky, Avi Tepman, Kenneth R. Reynolds, Younes Achkire, Dan Marohl +4 more | 2010-08-17 |
| 7636996 | Seal installation tool | — | 2009-12-29 |
| 7377002 | Scrubber box | Joseph Yudovsky, Avi Tepman, Kenneth R. Reynolds, Younes Achkire, Dan Marohl +4 more | 2008-05-27 |
| 6905968 | Process for selectively etching dielectric layers | Chang-Lin Hsieh, Jie Yuan, Theodoros Panagopoulos, Yan Ye | 2005-06-14 |
| 6569775 | Method for enhancing plasma processing performance | Peter Loewenhardt, John M. Yamartino, Diana Xiaobing Ma | 2003-05-27 |