| 12296427 |
Apparatus and method for CMP temperature control |
Haosheng Wu, Shou-Sung Chang, Chih Chung Chou, Jianshe Tang, Hari Soundararajan +1 more |
2025-05-13 |
|
| 12243761 |
Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging |
Martin Jeffrey Salinas, Zhepeng CONG, Xinning LUAN, Ashur J. ATANOS |
2025-03-04 |
|
| 12030093 |
Steam treatment stations for chemical mechanical polishing system |
Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Chih Chung Chou +2 more |
2024-07-09 |
$62,454,000 |
| 11919123 |
Apparatus and method for CMP temperature control |
Surajit Kumar, Hari Soundararajan, Shou-Sung Chang |
2024-03-05 |
$73,319,000 |
| 11865671 |
Temperature-based in-situ edge assymetry correction during CMP |
Haosheng Wu, Shou-Sung Chang, Jianshe Tang, Chih Chung Chou, Hari Soundararajan +1 more |
2024-01-09 |
$49,156,000 |
| 11697187 |
Temperature-based assymetry correction during CMP and nozzle for media dispensing |
Haosheng Wu, Shou-Sung Chang, Jianshe Tang, Chih Chung, Hari Soundararajan +1 more |
2023-07-11 |
$39,838,000 |
| 11633833 |
Use of steam for pre-heating of CMP components |
Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Paul D. Butterfield +2 more |
2023-04-25 |
$46,789,000 |
| 11628478 |
Steam cleaning of CMP components |
Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Chih Chung Chou +2 more |
2023-04-18 |
$36,767,000 |
| 11577358 |
Gas entrainment during jetting of fluid for temperature control in chemical mechanical polishing |
Surajit Kumar, Chih Chung Chou, Shou-Sung Chang |
2023-02-14 |
$35,617,000 |
| 11446711 |
Steam treatment stations for chemical mechanical polishing system |
Haosheng Wu, Jianshe Tang, Hari Soundararajan, Shou-Sung Chang, Chih Chung Chou +2 more |
2022-09-20 |
$25,949,000 |
| 10256120 |
Systems, methods and apparatus for post-chemical mechanical planarization substrate buff pre-cleaning |
Clinton SAKATA, Jim K. Atkinson, Brian J. Brown, Jianshe Tang, Yufei Chen +1 more |
2019-04-09 |
$19,096,000 |
| 10229842 |
Double sided buff module for post CMP cleaning |
Clinton SAKATA, Jim K. Atkinson, Tomohiko Kitajima, Brian J. Brown |
2019-03-12 |
$40,470,000 |
| 9873179 |
Carrier for small pad for chemical mechanical polishing |
Steven M. Zuniga, Hung Chih Chen, Eric Lau, Garrett H. Sin, Shou-Sung Chang |
2018-01-23 |
$41,300,000 |
| 9119461 |
High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subassemblies, and assembly methods |
Hung Chih Chen, Jim K. Atkinson, David Datong Huo |
2015-09-01 |
$10,783,000 |
| 8968055 |
Methods and apparatus for pre-chemical mechanical planarization buffing module |
Allen L. D'Ambra, Jim K. Atkinson, Hung Chih Chen |
2015-03-03 |
$11,301,000 |
| 8844546 |
Apparatus and method for cleaning semiconductor substrate using pressurized fluid |
Allen L. D'Ambra |
2014-09-30 |
$12,856,000 |
| 8181302 |
Brush alignment control mechanism |
Hung Chih Chen, Dan Zhang |
2012-05-22 |
$10,508,000 |
| 8101934 |
Methods and apparatus for detecting a substrate notch or flat |
Haochuan Zhang, Noel Manto |
2012-01-24 |
$14,249,000 |
| 7962990 |
Brush box cleaner module with force control |
Joseph Yudovsky, Allen L. D'Ambra |
2011-06-21 |
$5,178,000 |
| 7774887 |
Scrubber box and methods for using the same |
Joseph Yudovsky, Avi Tepman, Kenneth R. Reynolds, Younes Achkire, Dan Marohl +4 more |
2010-08-17 |
$3,871,000 |
| 7636996 |
Seal installation tool |
— |
2009-12-29 |
$18,530,000 |
| 7377002 |
Scrubber box |
Joseph Yudovsky, Avi Tepman, Kenneth R. Reynolds, Younes Achkire, Dan Marohl +4 more |
2008-05-27 |
$25,876,000 |
| 6905968 |
Process for selectively etching dielectric layers |
Chang-Lin Hsieh, Jie Yuan, Theodoros Panagopoulos, Yan Ye |
2005-06-14 |
$12,100,000 |
| 6569775 |
Method for enhancing plasma processing performance |
Peter Loewenhardt, John M. Yamartino, Diana Xiaobing Ma |
2003-05-27 |
$43,913,000 |
