Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Scrubber box and methods for using the same

Scrubber box and methods for using the same

US Patent 7774887 · Granted Aug 17, 2010

Estimated economic value: $3,871,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Redundant axis and degree of freedom for hardware-constrained remote center robo2025
Redundant axis and degree of freedom for hardware-constrained remote center robo2025
Rotary reactor for uniform particle coating with thin films2025
Multizone gas distribution plate for trench profile optimization2025
Devices, systems, and methods for maintaining a sterile surgical field2025
Tunable temperature controlled substrate support assembly2025
Apparatus and method for CMP temperature control2025
Detection and analysis of substrate support and pre-heat ring in a process chamb2025
Apparatus and methods for semiconductor processing2025
Imaging systems and methods for image-guided radiosurgery2025
Collaborative robot system on a mobile cart with a chamber docking system2025
Apparatus and methods for wafer chucking on a susceptor for ALD2024