Collaborative robot system on a mobile cart with a chamber docking system

Assignee

• Lam Research

Inventors

• Vitali Brand (1 patents)
• Kamesh V. Gadepally (10 patents)
• Jiawei Zhao (38 patents)
• Dan Marohl (45 patents)
• Niraj Vaghela (1 patents)
• Heng Liu (45 patents)
• Alexander James Walker (1 patents)
• Zachary Jake Blum (1 patents)
• Matthew Christopher Clark (1 patents)
• Jessica Jeana Kim (1 patents)

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