| 12394603 |
Multizone gas distribution plate for trench profile optimization |
Gordon Peng, Craig Rosslee |
2025-08-19 |
|
| 12334385 |
Tunable temperature controlled substrate support assembly |
Vijay D. Parkhe, Steven E. Babayan, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer |
2025-06-17 |
|
| 12186887 |
Collaborative robot system on a mobile cart with a chamber docking system |
Vitali Brand, Kamesh V. Gadepally, Jiawei Zhao, Niraj Vaghela, Heng Liu +4 more |
2025-01-07 |
|
| 12087557 |
Substrate processing system including coil with RF powered faraday shield |
Shen Peng, Tamarak Pandhumsoporn, Anthony Nguyen |
2024-09-10 |
$144,237,000 |
| 12009244 |
Tunable temperature controlled substrate support assembly |
Vijay D. Parkhe, Steven E. Babayan, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer |
2024-06-11 |
$84,570,000 |
| 11870252 |
Consolidated filter arrangement for devices in an RF environment |
Phillip Criminale, Steve Babayan, Scott Edmonson, Phillip R. Sommer, Chris Blank |
2024-01-09 |
$49,156,000 |
| 11615973 |
Substrate carrier using a proportional thermal fluid delivery system |
Phillip Criminale, Justin Phi, Sergio Fukuda Shoji, Brad L. Mays |
2023-03-28 |
$69,791,000 |
| 10923322 |
Articulated direct-mount inductor and associated systems and methods |
Oscar Lopez, Shen Peng, David Setton, Craig Rosslee, Andras Kuthi |
2021-02-16 |
$170,085,000 |
| 10820378 |
Consolidated filter arrangement for devices in an RF environment |
Phillip Criminale, Steve Babayan, Scott Edmonson, Phillip R. Sommer, Chris Blank |
2020-10-27 |
$26,711,000 |
| 10820377 |
Consolidated filter arrangement for devices in an RF environment |
Phillip Criminale, Steve Babayan, Scott Edmonson, Phillip R. Sommer, Chris Blank |
2020-10-27 |
$26,711,000 |
| 10553398 |
Power deposition control in inductively coupled plasma (ICP) reactors |
Samer Banna, Tza-Jing Gung, Vladimir Knyazik, Kyle Tantiwong, Valentin N. Todorow +1 more |
2020-02-04 |
$27,329,000 |
| 10535544 |
Tunable temperature controlled substrate support assembly |
Vijay D. Parkhe, Steven E. Babayan, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer |
2020-01-14 |
$50,821,000 |
| 10490429 |
Substrate carrier using a proportional thermal fluid delivery system |
Phillip Criminale, Justin Phi, Sergio Fukuda Shoji, Brad L. Mays |
2019-11-26 |
$24,423,000 |
| 10109460 |
Universal non-invasive chamber impedance measurement system and associated methods |
Chin-Yi Liu, David Schaefer |
2018-10-23 |
$28,319,000 |
| 9872341 |
Consolidated filter arrangement for devices in an RF environment |
Phillip Criminale, Steve Babayan, Scott Edmonson, Phillip R. Sommer, Chris Blank |
2018-01-16 |
$25,242,000 |
| 9472435 |
Tunable temperature controlled substrate support assembly |
Vijay D. Parkhe, Steven E. Babayan, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer |
2016-10-18 |
$11,711,000 |
| 8322045 |
Single wafer apparatus for drying semiconductor substrates using an inert gas air-knife |
Nathan D. Stein, Younes Achkire, Timothy Joseph Franklin, Julia Svirchevski |
2012-12-04 |
$6,403,000 |
| 8318609 |
Method of depositing materials on a non-planar surface |
Timothy Joseph Franklin, Ratson Morad |
2012-11-27 |
|
| 7934979 |
Retaining ring with tapered inner surface |
Ming-Kuei Tseng |
2011-05-03 |
$18,491,000 |
| 7774887 |
Scrubber box and methods for using the same |
Joseph Yudovsky, Avi Tepman, Kenneth R. Reynolds, Younes Achkire, Steve Ghanayem +4 more |
2010-08-17 |
$3,871,000 |
| 7677958 |
Retaining ring with flange for chemical mechanical polishing |
Ming-Kuei Tseng |
2010-03-16 |
$12,179,000 |
| 7497932 |
Electro-chemical deposition system |
Mark Cassidy Cridlin Lloyd, Donald Olgado, Ratson Morad, Peter Hey, Mark Denome +10 more |
2009-03-03 |
$11,197,000 |
| 7377002 |
Scrubber box |
Joseph Yudovsky, Avi Tepman, Kenneth R. Reynolds, Younes Achkire, Steve Ghanayem +4 more |
2008-05-27 |
$25,876,000 |
| 7094139 |
Retaining ring with flange for chemical mechanical polishing |
Ming-Kuei Tseng |
2006-08-22 |
$13,029,000 |
| 6837964 |
Integrated platen assembly for a chemical mechanical planarization system |
Timothy Joseph Franklin |
2005-01-04 |
$20,484,000 |
