Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11615973 | Substrate carrier using a proportional thermal fluid delivery system | Phillip Criminale, Dan Marohl, Sergio Fukuda Shoji, Brad L. Mays | 2023-03-28 |
| 10854427 | Radio frequency (RF) pulsing impedance tuning with multiplier mode | Katsumasa Kawasaki, Kartik Ramaswamy, Sergio Fukuda Shoji, Daisuke Shimizu | 2020-12-01 |
| 10490429 | Substrate carrier using a proportional thermal fluid delivery system | Phillip Criminale, Dan Marohl, Sergio Fukuda Shoji, Brad L. Mays | 2019-11-26 |
| 10468233 | RF power delivery regulation for processing substrates | Katsumasa Kawasaki, Sergio Fukuda Shoji | 2019-11-05 |
| 9872373 | Smart multi-level RF pulsing methods | Daisuke Shimizu, Wonseok Lee, Katsumasa Kawasaki, Li Ling, Kevin Choi | 2018-01-16 |
| 9788405 | RF power delivery with approximated saw tooth wave pulsing | Katsumasa Kawasaki, Sergio Fukuda Shoji, Daisuke Shimizu | 2017-10-10 |
| 9741539 | RF power delivery regulation for processing substrates | Katsumasa Kawasaki, Sergio Fukuda Shoji | 2017-08-22 |