Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406865 | Substrate carrier with array of independently controllable heater elements | Steven E. Babayan, Zhiqiang Guo | 2025-09-02 |
| 12381109 | Hermetic tubular linear motor based wafer lift actuator | Alexander SULYMAN, Cory Bowdach | 2025-08-05 |
| 12272575 | Advanced temperature control for wafer carrier in plasma processing chamber | Fernando Silveira, Chunlei Zhang, Jaeyong Cho | 2025-04-08 |
| 12166366 | Substrate enclosure system with assembly for charging a validation wafer | Zhiqiang Guo, Andrew S. C. Ho, Rachel Sara Stolzman, Michael Carl Hankes | 2024-12-10 |
| 12148645 | Calibration jig and calibration method | Andrew Myles, Denis M. Koosau, Peter Muraoka | 2024-11-19 |
| 12009236 | Sensors and system for in-situ edge ring erosion monitor | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Leonard Tedeschi, Daniel Sang Byun +5 more | 2024-06-11 |
| 11935773 | Calibration jig and calibration method | Andrew Myles, Denis M. Koosau, Peter Muraoka | 2024-03-19 |
| 11929241 | Temperature measurement for substrate carrier using a heater element array | Zhiqiang Guo | 2024-03-12 |
| 11924972 | Diagnostic disc with a high vacuum and temperature tolerant power source | Zhiqiang Guo, Andrew Myles, Martin Perez-Guzman | 2024-03-05 |
| 11913777 | Detector for process kit ring wear | Yogananda Sarode Vishwanath | 2024-02-27 |
| 11870252 | Consolidated filter arrangement for devices in an RF environment | Steve Babayan, Scott Edmonson, Phillip R. Sommer, Dan Marohl, Chris Blank | 2024-01-09 |
| 11837479 | Advanced temperature control for wafer carrier in plasma processing chamber | Fernando Silveira, Chunlei Zhang, Jaeyong Cho | 2023-12-05 |
| 11817724 | Enclosure system with charging assembly | Zhiqiang Guo, Andrew S. C. Ho, Rachel Sara Stolzman, Michael Carl Hankes | 2023-11-14 |
| 11721569 | Method and apparatus for determining a position of a ring within a process kit | Andrew Myles, Andreas Schmid, Steven E. Babayan | 2023-08-08 |
| 11622419 | Azimuthally tunable multi-zone electrostatic chuck | Chunlei Zhang, Steven E. Babayan, David Ullstrom | 2023-04-04 |
| 11615973 | Substrate carrier using a proportional thermal fluid delivery system | Justin Phi, Dan Marohl, Sergio Fukuda Shoji, Brad L. Mays | 2023-03-28 |
| 11589474 | Diagnostic disc with a high vacuum and temperature tolerant power source | Zhiqiang Guo, Philip Allan Kraus, Andrew Myles, Martin Perez-Guzman | 2023-02-21 |
| 11367645 | Temperature tunable multi-zone electrostatic chuck | Zhiqiang Guo, Andrew Myles | 2022-06-21 |
| 11361948 | Temperature measurement for substrate carrier using a heater element array | Zhiqiang Guo | 2022-06-14 |
| 10820377 | Consolidated filter arrangement for devices in an RF environment | Steve Babayan, Scott Edmonson, Phillip R. Sommer, Dan Marohl, Chris Blank | 2020-10-27 |
| 10820378 | Consolidated filter arrangement for devices in an RF environment | Steve Babayan, Scott Edmonson, Phillip R. Sommer, Dan Marohl, Chris Blank | 2020-10-27 |
| 10490429 | Substrate carrier using a proportional thermal fluid delivery system | Justin Phi, Dan Marohl, Sergio Fukuda Shoji, Brad L. Mays | 2019-11-26 |
| 10440777 | Azimuthally tunable multi-zone electrostatic chuck | Chunlei Zhang, Steven E. Babayan, David Ullstrom | 2019-10-08 |
| 10410900 | Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramic | Shih-Ying Huang, Steven E. Babayan, Stephen Prouty, Anthony Huang | 2019-09-10 |
| 10366867 | Temperature measurement for substrate carrier using a heater element array | Zhiqiang Guo | 2019-07-30 |