Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403209 | Decontamination device | Tsukasa Kitano, Kazuhiko Kitahora, Yoshitaka OGATA, Daisuke Kakuda, Yoshiaki Okada +1 more | 2025-09-02 |
| 12406865 | Substrate carrier with array of independently controllable heater elements | Steven E. Babayan, Phillip Criminale | 2025-09-02 |
| 12397075 | Pass box | Koji Kawasaki, Daisuke Kakuda, Jun Masudome, Tsukasa Kitano | 2025-08-26 |
| 12383644 | Decontamination system | Koji Kawasaki, Gun SOU, Tsukasa Kitano, Haruka Futamura, Yukihiro Yazaki +2 more | 2025-08-12 |
| 12334385 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Konstantin Makhratchev, Phillip R. Sommer, Dan Marohl | 2025-06-17 |
| 12318798 | Mist supply device | Koji Kawasaki, Daisuke Kakuda, Jun Masudome, Haruka Futamura, Yukihiro Yazaki +2 more | 2025-06-03 |
| 12243756 | Temperature controlled substrate support assembly | Vijay D. Parkhe, Konstantin Makhratchev, Masanori Ono | 2025-03-04 |
| 12194184 | Decontamination device and pass box in which same is disposed | Koji Kawasaki, Daisuke Kakuda, Jun Masudome, Haruka Futamura, Yukihiro Yazaki +2 more | 2025-01-14 |
| 12194185 | Continuous decontamination device | Koji Kawasaki, Daisuke Kakuda, Jun Masudome, Haruka Futamura, Yukihiro Yazaki +2 more | 2025-01-14 |
| 12166366 | Substrate enclosure system with assembly for charging a validation wafer | Phillip Criminale, Andrew S. C. Ho, Rachel Sara Stolzman, Michael Carl Hankes | 2024-12-10 |
| D1048474 | Lighting fixture | — | 2024-10-22 |
| 12102727 | Continuous decontamination and sterilization device | Koji Kawasaki, Daisuke Kakuda, Yoshitaka OGATA, Jun Masudome, Haruka Futamura +1 more | 2024-10-01 |
| 12009244 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Konstantin Makhratchev, Phillip R. Sommer, Dan Marohl | 2024-06-11 |
| 11929241 | Temperature measurement for substrate carrier using a heater element array | Phillip Criminale | 2024-03-12 |
| 11924972 | Diagnostic disc with a high vacuum and temperature tolerant power source | Phillip Criminale, Andrew Myles, Martin Perez-Guzman | 2024-03-05 |
| 11817724 | Enclosure system with charging assembly | Phillip Criminale, Andrew S. C. Ho, Rachel Sara Stolzman, Michael Carl Hankes | 2023-11-14 |
| 11759829 | Method for decontaminating low-temperature article and a pass box used in same | Koji Kawasaki, Daisuke Kakuda, Jun Masudome, Haruka Futamura, Yukihiro Yazaki +2 more | 2023-09-19 |
| 11589474 | Diagnostic disc with a high vacuum and temperature tolerant power source | Phillip Criminale, Philip Allan Kraus, Andrew Myles, Martin Perez-Guzman | 2023-02-21 |
| 11378509 | Evaluation method for hydrogen-bearing components, porosity and pore size distribution of organic-rich shale | Min Wang, Jinbu Li, Chuanming Li, Shuangfang Lu | 2022-07-05 |
| 11367645 | Temperature tunable multi-zone electrostatic chuck | Phillip Criminale, Andrew Myles | 2022-06-21 |
| 11361948 | Temperature measurement for substrate carrier using a heater element array | Phillip Criminale | 2022-06-14 |
| 11162362 | Anchoring apparatus and operation method thereof | Housheng Jia, Wenbing Guo, Shaowei LIU, Wenyuan Jiang, Zhiqiang Zhao +6 more | 2021-11-02 |
| 11158526 | Temperature controlled substrate support assembly | Vijay D. Parkhe, Konstantin Makhratchev, Masanori Ono | 2021-10-26 |
| 11142743 | Microorganism contamination inspection system | Koji Kawasaki, Haruka Hutamura, Yukihiro Yazaki | 2021-10-12 |
| 11142742 | Incubator | Koji Kawasaki, Hideo Nishiwaki, Daisuke Kakuda, Jun Masudome, Yukihiro Yazaki +1 more | 2021-10-12 |