Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12243756 | Temperature controlled substrate support assembly | Vijay D. Parkhe, Konstantin Makhratchev, Zhiqiang Guo | 2025-03-04 |
| 11158526 | Temperature controlled substrate support assembly | Vijay D. Parkhe, Konstantin Makhratchev, Zhiqiang Guo | 2021-10-26 |
| 10460916 | Real time monitoring with closed loop chucking force control | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Senh Thach | 2019-10-29 |
| 10403534 | Pixilated cooling, temperature controlled substrate support assembly | Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Matthew J. Busche, Konstantin Makhratchev, Senh Thach | 2019-09-03 |
| 10121688 | Electrostatic chuck with external flow adjustments for improved temperature distribution | Matthew J. Busche, Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Senh Thach, Konstantin Makhratchev | 2018-11-06 |
| 9875923 | Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Senh Thach | 2018-01-23 |
| 9622375 | Electrostatic chuck with external flow adjustments for improved temperature distribution | Matthew J. Busche, Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Senh Thach, Konstantin Makhratchev | 2017-04-11 |
| 9558981 | Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Senh Thach | 2017-01-31 |
| 9520315 | Electrostatic chuck with internal flow adjustments for improved temperature distribution | Vijay D. Parkhe, Matthew J. Busche, Wendell Glenn Boyd, Jr., Senh Thach, Konstantin Makhratchev | 2016-12-13 |
| 8747838 | Method for isolating smooth muscle stem cells | Tetsuo Maruyama | 2014-06-10 |
| 6506290 | Sputtering apparatus with magnetron device | — | 2003-01-14 |
| 6480694 | Oil application roller | Kohichi Kimura, Tatsuo Takagi, Munehiko Fukase, Takeshi Kuboyama | 2002-11-12 |
| 6259592 | Apparatus for retaining a workpiece upon a workpiece support and method of manufacturing same | — | 2001-07-10 |
| 6095754 | Turbo-Molecular pump with metal matrix composite rotor and stator | — | 2000-08-01 |