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Temperature controlled substrate support assembly |
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2025-03-04 |
| 11158526 |
Temperature controlled substrate support assembly |
Vijay D. Parkhe, Konstantin Makhratchev, Zhiqiang Guo |
2021-10-26 |
| 10460916 |
Real time monitoring with closed loop chucking force control |
Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Senh Thach |
2019-10-29 |
| 10403534 |
Pixilated cooling, temperature controlled substrate support assembly |
Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Matthew J. Busche, Konstantin Makhratchev, Senh Thach |
2019-09-03 |
| 10121688 |
Electrostatic chuck with external flow adjustments for improved temperature distribution |
Matthew J. Busche, Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Senh Thach, Konstantin Makhratchev |
2018-11-06 |
| 9875923 |
Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods |
Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Senh Thach |
2018-01-23 |
| 9622375 |
Electrostatic chuck with external flow adjustments for improved temperature distribution |
Matthew J. Busche, Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Senh Thach, Konstantin Makhratchev |
2017-04-11 |
| 9558981 |
Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods |
Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Senh Thach |
2017-01-31 |
| 9520315 |
Electrostatic chuck with internal flow adjustments for improved temperature distribution |
Vijay D. Parkhe, Matthew J. Busche, Wendell Glenn Boyd, Jr., Senh Thach, Konstantin Makhratchev |
2016-12-13 |
| 8747838 |
Method for isolating smooth muscle stem cells |
Tetsuo Maruyama |
2014-06-10 |
| 6506290 |
Sputtering apparatus with magnetron device |
— |
2003-01-14 |
| 6480694 |
Oil application roller |
Kohichi Kimura, Tatsuo Takagi, Munehiko Fukase, Takeshi Kuboyama |
2002-11-12 |
| 6259592 |
Apparatus for retaining a workpiece upon a workpiece support and method of manufacturing same |
— |
2001-07-10 |
| 6095754 |
Turbo-Molecular pump with metal matrix composite rotor and stator |
— |
2000-08-01 |
