Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424413 | Substrate support with real time force and film stress control | Wendell Glenn Boyd, Jr., Govinda Raj | 2025-09-23 |
| 11915913 | Substrate support with real time force and film stress control | Wendell Glenn Boyd, Jr., Govinda Raj | 2024-02-27 |
| 11676802 | Substrate support with real time force and film stress control | Wendell Glenn Boyd, Jr., Govinda Raj | 2023-06-13 |
| 10910238 | Heater pedestal assembly for wide range temperature control | Kaushik Alayavalli, Ajit Balakrishna, Sanjeev Baluja, Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez +3 more | 2021-02-02 |
| 10879046 | Substrate support with real time force and film stress control | Wendell Glen Boyd, Jr., Govinda Raj | 2020-12-29 |
| 10736182 | Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers | Wendell Glenn Boyd, Jr., Todd Egan, Gregory L. Kirk, Vijay D. Parkhe, Michael R. Rice +1 more | 2020-08-04 |
| 10520371 | Optical fiber temperature sensors, temperature monitoring apparatus, and manufacturing methods | — | 2019-12-31 |
| 10460916 | Real time monitoring with closed loop chucking force control | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Konstantin Makhratchev, Masanori Ono, Senh Thach | 2019-10-29 |
| 10403534 | Pixilated cooling, temperature controlled substrate support assembly | Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Konstantin Makhratchev, Masanori Ono, Senh Thach | 2019-09-03 |
| 10395964 | Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck | Vijay D. Parkhe, Michael R. Rice | 2019-08-27 |
| 10121688 | Electrostatic chuck with external flow adjustments for improved temperature distribution | Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Senh Thach, Konstantin Makhratchev, Masanori Ono | 2018-11-06 |
| 9986598 | Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods | Wendell Glenn Boyd, Jr., Dmitry A. Dzilno, Vijay D. Parkhe, Michael R. Rice, Leon Volfovski | 2018-05-29 |
| 9875923 | Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Konstantin Makhratchev, Masanori Ono, Senh Thach | 2018-01-23 |
| 9831111 | Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck | Vijay D. Parkhe, Michael R. Rice | 2017-11-28 |
| 9698041 | Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Michael R. Rice, Leon Volfovski | 2017-07-04 |
| 9622375 | Electrostatic chuck with external flow adjustments for improved temperature distribution | Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Senh Thach, Konstantin Makhratchev, Masanori Ono | 2017-04-11 |
| 9558981 | Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Konstantin Makhratchev, Masanori Ono, Senh Thach | 2017-01-31 |
| 9520315 | Electrostatic chuck with internal flow adjustments for improved temperature distribution | Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Senh Thach, Konstantin Makhratchev, Masanori Ono | 2016-12-13 |