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Substrate support with real time force and film stress control |
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Substrate support with real time force and film stress control |
Wendell Glenn Boyd, Jr., Govinda Raj |
2024-02-27 |
| 11676802 |
Substrate support with real time force and film stress control |
Wendell Glenn Boyd, Jr., Govinda Raj |
2023-06-13 |
| 10910238 |
Heater pedestal assembly for wide range temperature control |
Kaushik Alayavalli, Ajit Balakrishna, Sanjeev Baluja, Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez +3 more |
2021-02-02 |
| 10879046 |
Substrate support with real time force and film stress control |
Wendell Glen Boyd, Jr., Govinda Raj |
2020-12-29 |
| 10736182 |
Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers |
Wendell Glenn Boyd, Jr., Todd Egan, Gregory L. Kirk, Vijay D. Parkhe, Michael R. Rice +1 more |
2020-08-04 |
| 10520371 |
Optical fiber temperature sensors, temperature monitoring apparatus, and manufacturing methods |
— |
2019-12-31 |
| 10460916 |
Real time monitoring with closed loop chucking force control |
Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Konstantin Makhratchev, Masanori Ono, Senh Thach |
2019-10-29 |
| 10403534 |
Pixilated cooling, temperature controlled substrate support assembly |
Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Konstantin Makhratchev, Masanori Ono, Senh Thach |
2019-09-03 |
| 10395964 |
Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck |
Vijay D. Parkhe, Michael R. Rice |
2019-08-27 |
| 10121688 |
Electrostatic chuck with external flow adjustments for improved temperature distribution |
Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Senh Thach, Konstantin Makhratchev, Masanori Ono |
2018-11-06 |
| 9986598 |
Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods |
Wendell Glenn Boyd, Jr., Dmitry A. Dzilno, Vijay D. Parkhe, Michael R. Rice, Leon Volfovski |
2018-05-29 |
| 9875923 |
Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods |
Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Konstantin Makhratchev, Masanori Ono, Senh Thach |
2018-01-23 |
| 9831111 |
Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck |
Vijay D. Parkhe, Michael R. Rice |
2017-11-28 |
| 9698041 |
Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods |
Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Michael R. Rice, Leon Volfovski |
2017-07-04 |
| 9622375 |
Electrostatic chuck with external flow adjustments for improved temperature distribution |
Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Senh Thach, Konstantin Makhratchev, Masanori Ono |
2017-04-11 |
| 9558981 |
Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods |
Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Konstantin Makhratchev, Masanori Ono, Senh Thach |
2017-01-31 |
| 9520315 |
Electrostatic chuck with internal flow adjustments for improved temperature distribution |
Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Senh Thach, Konstantin Makhratchev, Masanori Ono |
2016-12-13 |
