| 12394604 |
Plasma source with floating electrodes |
Quoc Truong, Robert B. Moore |
2025-08-19 |
|
| 12317378 |
Multi-zone heater control for wafer processing equipment |
Uwe Haller, Kiyki-Shiy Shang |
2025-05-27 |
|
| 12288677 |
Vertically adjustable plasma source |
Tsutomu Tanaka, Jared Ahmad Lee, Rakesh Ramadas, Gregory J. Wilson, Sriharish Srinivasan |
2025-04-29 |
|
| 12224156 |
Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool |
Xiaopu Li, Jozef Kudela, Kallol Bera, Tsutomu Tanaka |
2025-02-11 |
|
| 12198908 |
Magnetically coupled RF filter for substrate processing chambers |
Edward P. Hammond, IV, Alexander V. Garachtchenko |
2025-01-14 |
|
| 12094748 |
Bipolar esc with balanced RF impedance |
Jian Li, Edward P. Hammond, IV, Juan Carlos Rocha-Alvarez, Wenhao Zhang |
2024-09-17 |
$46,375,000 |
| 12080584 |
Real time bias detection and correction for electrostatic chuck |
Jian Li, Juan Carlos Rocha-Alvarez |
2024-09-03 |
$44,731,000 |
| 12057339 |
Bipolar electrostatic chuck to limit DC discharge |
Jian Li, Juan Carlos Rocha-Alvarez, Zheng John Ye, Paul Brillhart |
2024-08-06 |
$90,312,000 |
| 12040210 |
Multi-pressure bipolar electrostatic chucking |
Jian Li, Juan Carlos Rocha-Alvarez, Paul Brillhart, Akshay Gunaji, Mayur Govind Kulkarni +6 more |
2024-07-16 |
$116,305,000 |
| 11956883 |
Methods and apparatus for controlling RF parameters at multiple frequencies |
Zheng John Ye, Daemian Raj Benjamin Raj, Shailendra Srivastava, Nikhil Sudhindrarao Jorapur, Ndanka O. Mukuti +1 more |
2024-04-09 |
$47,694,000 |
| 11923172 |
Paired dynamic parallel plate capacitively coupled plasmas |
Hari Ponnekanti, Tsutomu Tanaka, Mandyam Sriram, Sanjeev Baluja, Mario David Silvetti |
2024-03-05 |
$73,319,000 |
| 11901209 |
High temperature bipolar electrostatic chuck |
Jian Li, Zheng John Ye, Juan Carlos Rocha-Alvarez |
2024-02-13 |
$47,589,000 |
| 11823871 |
Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool |
Jozef Kudela, Tsutomu Tanaka, Alexander V. Garachtchenko, Avinash Shervegar, Kallol Bera +3 more |
2023-11-21 |
$39,416,000 |
| 11776793 |
Plasma source with ceramic electrode plate |
Robert B. Moore, Jared Ahmad Lee, Marc Shull, Tsutomu Tanaka, Alexander V. Garachtchenko |
2023-10-03 |
$34,462,000 |
| 11776835 |
Power supply signal conditioning for an electrostatic chuck |
Zheng John Ye, Daemian Raj Benjamin Raj, Rana Howlader, Abhigyan Keshri, Sanjay Kamath +6 more |
2023-10-03 |
$34,462,000 |
| 11705312 |
Vertically adjustable plasma source |
Tsutomu Tanaka, Jared Ahmad Lee, Rakesh Ramadas, Gregory J. Wilson, Sriharish Srinivasan |
2023-07-18 |
$58,990,000 |
| 11631583 |
RF power source operation in plasma enhanced processes |
Farhad Moghadam, Hari Ponnekanti |
2023-04-18 |
$36,767,000 |
| 11626853 |
RF power delivery architecture with switchable match and frequency tuning |
Edward P. Hammond, IV, Yury Trachuk |
2023-04-11 |
$32,726,000 |
| 11594440 |
Real time bias detection and correction for electrostatic chuck |
Jian Li, Juan Carlos Rocha-Alvarez |
2023-02-28 |
$49,197,000 |
| 11587817 |
High temperature bipolar electrostatic chuck |
Jian Li, Zheng John Ye, Juan Carlos Rocha-Alvarez |
2023-02-21 |
$24,540,000 |
| 11570879 |
Methods and apparatus for controlling RF parameters at multiple frequencies |
Zheng John Ye, Daemian Raj Benjamin Raj, Shailendra Srivastava, Nikhil Sudhindrarao Jorapur, Ndanka O. Mukuti +1 more |
2023-01-31 |
$29,381,000 |
| 11430680 |
Position and temperature monitoring of ALD platen susceptor |
Abraham Ravid, Kevin Griffin, Joseph Yudovsky, Kaushal Gangakhedkar, Alex Minkovich |
2022-08-30 |
$41,861,000 |
| 11315763 |
Shaped electrodes for improved plasma exposure from vertical plasma source |
Kallol Bera, Anantha K. Subramani, John C. Forster, Tsutomu Tanaka |
2022-04-26 |
$43,127,000 |
| 11282676 |
Paired dynamic parallel plate capacitively coupled plasmas |
Hari Ponnekanti, Tsutomu Tanaka, Mandyam Sriram, Sanjeev Baluja, Mario David Silvetti |
2022-03-22 |
$64,102,000 |
| D938373 |
Substrate transfer structure |
Jason M. Schaller, Benjamin B. Riordon, Mitchell DiSanto, Paul Forderhase, Gary Wyka +7 more |
2021-12-14 |
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