Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12317378 | Multi-zone heater control for wafer processing equipment | Uwe Haller, Dmitry A. Dzilno | 2025-05-27 |
| 12283500 | Methods and systems for temperature control for a substrate | Paul Z. Wirth, Mikhail Taraboukhine | 2025-04-22 |
| 11984333 | Methods and systems for temperature control for a substrate | Paul Z. Wirth, Mikhail Taraboukhine | 2024-05-14 |
| 11862499 | Multiplexing control of multiple positional sensors in device manufacturing machines | Mikhail Taraboukhine, Venkata Raghavaiah Chowdhary Kode | 2024-01-02 |
| 11586573 | Distributed input/output (IO) control and interlock ring architecture | James Robert Reed, Martin A. Jolivet | 2023-02-21 |
| 11551951 | Methods and systems for temperature control for a substrate | Paul Z. Wirth, Mikhail Taraboukhine | 2023-01-10 |
| 11545346 | Capacitive sensing data integration for plasma chamber condition monitoring | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Leonard Tedeschi, Mikhail Taraboukhine +2 more | 2023-01-03 |