Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283500 | Methods and systems for temperature control for a substrate | Paul Z. Wirth, Kiyki-Shiy Shang | 2025-04-22 |
| 12160243 | Algorithm for accurately converting a wide range of photo signals into an electrical current | Oleg V. Serebryanov, Alexander Goldin, Vilen K. NESTOROV | 2024-12-03 |
| 11984333 | Methods and systems for temperature control for a substrate | Paul Z. Wirth, Kiyki-Shiy Shang | 2024-05-14 |
| 11862499 | Multiplexing control of multiple positional sensors in device manufacturing machines | Kiyki-Shiy Shang, Venkata Raghavaiah Chowdhary Kode | 2024-01-02 |
| 11551951 | Methods and systems for temperature control for a substrate | Paul Z. Wirth, Kiyki-Shiy Shang | 2023-01-10 |
| 11545346 | Capacitive sensing data integration for plasma chamber condition monitoring | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Leonard Tedeschi, Kiyki-Shiy Shang +2 more | 2023-01-03 |
| 7746473 | Full spectrum adaptive filtering (FSAF) for low open area endpoint detection | — | 2010-06-29 |