Issued Patents All Time
Showing 25 most recent of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283500 | Methods and systems for temperature control for a substrate | Kiyki-Shiy Shang, Mikhail Taraboukhine | 2025-04-22 |
| 12278134 | Servo-control system | Behzad Taheri | 2025-04-15 |
| 12215966 | Methods and systems of optical inspection of electronic device manufacturing machines | Mohsin Waqar, Todd James Brill, Paul Fisher, Ilias Iliopoulos, Charles G. Potter | 2025-02-04 |
| 12130606 | Disturbance compensation for substrate processing recipes | Atilla Kilicarslan, Raechel Chu-Hui Tan, Brooke Elise Montgomery | 2024-10-29 |
| 11984333 | Methods and systems for temperature control for a substrate | Kiyki-Shiy Shang, Mikhail Taraboukhine | 2024-05-14 |
| 11935771 | Modular mainframe layout for supporting multiple semiconductor process modules or chambers | Randy Harris, Coby Scott GROVE, Avinash SHANTARAM, Alpay Yilmaz, Amir NISSAN +3 more | 2024-03-19 |
| 11935770 | Modular mainframe layout for supporting multiple semiconductor process modules or chambers | Randy Harris, Coby Scott GROVE, Avinash SHANTARAM, Alpay Yilmaz, Amir NISSAN +1 more | 2024-03-19 |
| 11837478 | Temperature-controllable process chambers, electronic device processing systems, and manufacturing methods | — | 2023-12-05 |
| 11830760 | Servo-control system | Behzad Taheri | 2023-11-28 |
| 11823937 | Calibration of an aligner station of a processing system | Nicholas Michael Bergantz, Andreas Schmid, Leon Volfovski, Sanggyum Kim, Damon K. Cox | 2023-11-21 |
| 11813757 | Centerfinding for a process kit or process kit carrier at a manufacturing system | Ali Utku Pehlivan, Mohsin Waqar, Todd James Brill | 2023-11-14 |
| 11798833 | Methods of use of a servo control system | Behzad Taheri | 2023-10-24 |
| 11791172 | Methods of controlling gas pressure in gas-pulsing-based precursor distribution systems | Mauro Cimino, Arkaprava Dan | 2023-10-17 |
| 11772958 | Mass flow control based on micro-electromechanical devices | Nir Merry, Ming Xu, Sushant S. Koshti, Raechel Chu-Hui Tan | 2023-10-03 |
| 11590662 | Robot for simultaneous substrate transfer | Charles T. Carlson, Jason M. Schaller | 2023-02-28 |
| 11582378 | Methods and apparatus for absolute and relative depth measurements using camera focus distance | Ozkan Celik, Patricia A. Schulze, Gregory John Freeman, Tommaso Vercesi | 2023-02-14 |
| 11551951 | Methods and systems for temperature control for a substrate | Kiyki-Shiy Shang, Mikhail Taraboukhine | 2023-01-10 |
| 11415230 | Slit valve pneumatic control | Ofer Amir, Michael Kuchar | 2022-08-16 |
| 11413767 | Sensor-based position and orientation feedback of robot end effector with respect to destination chamber | Preetham Kariyaiah Shivanna, Jeffrey C. Hudgens | 2022-08-16 |
| D938373 | Substrate transfer structure | Jason M. Schaller, Benjamin B. Riordon, Mitchell DiSanto, Paul Forderhase, Gary Wyka +7 more | 2021-12-14 |
| 11117265 | Robot for simultaneous substrate transfer | Charles T. Carlson, Jason M. Schaller | 2021-09-14 |
| 11107709 | Temperature-controllable process chambers, electronic device processing systems, and manufacturing methods | — | 2021-08-31 |
| 11032464 | Methods and apparatus for absolute and relative depth measurements using camera focus distance | Ozkan Celik, Patricia A. Schulze, Gregory John Freeman, Tommaso Vercesi | 2021-06-08 |
| 10923374 | Walking beam chamber | — | 2021-02-16 |
| 10837119 | Microelectronic substrate electro processing system | Robert B. Moore, David Silvetti, Randy Harris, Daniel J. Woodruff, Gregory J. Wilson | 2020-11-17 |