Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12215966 | Methods and systems of optical inspection of electronic device manufacturing machines | Paul Z. Wirth, Todd James Brill, Paul Fisher, Ilias Iliopoulos, Charles G. Potter | 2025-02-04 |
| 11813757 | Centerfinding for a process kit or process kit carrier at a manufacturing system | Ali Utku Pehlivan, Paul Z. Wirth, Todd James Brill | 2023-11-14 |
| 11031262 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2021-06-08 |
| 10916451 | Systems and methods of gap calibration via direct component contact in electronic device manufacturing systems | Marvin L. Freeman | 2021-02-09 |
| 10636684 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2020-04-28 |
| 10403515 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2019-09-03 |
| 10361099 | Systems and methods of gap calibration via direct component contact in electronic device manufacturing systems | Marvin L. Freeman | 2019-07-23 |