| 12334384 |
Methods and apparatus for minimizing substrate backside damage |
Liangfa Hu, Abdul Aziz Khaja, Sarah Michelle Bobek, Yoichi Suzuki |
2025-06-17 |
|
| 12211694 |
Ultra-high modulus and etch selectivity boron-carbon hardmask films |
Ziqing Duan, Karthik Thimmavajjula Narasimha, Kwangduk Douglas Lee, Bok Hoen Kim |
2025-01-28 |
|
| 12211728 |
Electrostatic chuck design with improved chucking and arcing performance |
Abdul Aziz Khaja, Venkata Sharat Chandra Parimi, Sarah Michelle Bobek, Vinay Prabhakar |
2025-01-28 |
|
| 12191115 |
Dual RF for controllable film deposition |
Venkata Sharat Chandra Parimi, Xiaoquan Min, Zheng John Ye, Vinay Prabhakar, Lu Xu +1 more |
2025-01-07 |
|
| 12136549 |
Plasma-enhanced chemical vapor deposition of carbon hard-mask |
Byung Seok KWON, Kwangduk Douglas Lee, Bushra Afzal, Sungwon Ha, Vinay Prabhakar +3 more |
2024-11-05 |
$79,202,000 |
| 12112949 |
Highly etch selective amorphous carbon film |
Rajesh Prasad, Sarah Michelle Bobek, Kwangduk Douglas Lee, Harry Whitesell, Hidetaka Oshio +4 more |
2024-10-08 |
$69,128,000 |
| 12100609 |
Electrostatic chucking process |
Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Kwangduk Douglas Lee |
2024-09-24 |
$100,019,000 |
| 12027366 |
Reduced hydrogen deposition processes |
Xiaoquan Min, Venkata Sharat Chandra Parimi, Kwangduk Douglas Lee |
2024-07-02 |
$85,126,000 |
| 12014927 |
Highly etch selective amorphous carbon film |
Rajesh Prasad, Sarah Michelle Bobek, Kwangduk Douglas Lee, Harry Whitesell, Hidetaka Oshio +4 more |
2024-06-18 |
$83,264,000 |
| 12000048 |
Pedestal for substrate processing chambers |
Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Vinay Prabhakar, Kwangduk Douglas Lee, Sungwon Ha +1 more |
2024-06-04 |
$68,807,000 |
| 11830706 |
Heated pedestal design for improved heat transfer and temperature uniformity |
Venkata Sharat Chandra Parimi, Zubin Huang, Jian Li, Satish Radhakrishnan, Rui Cheng +7 more |
2023-11-28 |
$39,424,000 |
| 11821082 |
Reduced defect deposition processes |
Xiaoquan Min, Byung Ik Song, Hyung Je Woo, Venkata Sharat Chandra Parimi, Kwangduk Douglas Lee |
2023-11-21 |
$39,416,000 |
| 11814716 |
Faceplate having blocked center hole |
Fang Ruan, Jiheng Zhao, Diwakar Kedlaya |
2023-11-14 |
$33,075,000 |
| 11810764 |
Faceplate with edge flow control |
Fang Ruan, Rajaram Narayanan, Diwakar Kedlaya |
2023-11-07 |
$37,048,000 |
| 11756819 |
Methods and apparatus for minimizing substrate backside damage |
Liangfa Hu, Abdul Aziz Khaja, Sarah Michelle Bobek, Yoichi Suzuki |
2023-09-12 |
$47,983,000 |
| 11728168 |
Ultra-high modulus and etch selectivity boron-carbon hardmask films |
Ziqing Duan, Karthik Thimmavajjula Narasimha, Kwangduk Douglas Lee, Bok Hoen Kim |
2023-08-15 |
$42,730,000 |
| 11682574 |
Electrostatic chuck design with improved chucking and arcing performance |
Abdul Aziz Khaja, Venkata Sharat Chandra Parimi, Sarah Michelle Bobek, Vinay Prabhakar |
2023-06-20 |
$48,645,000 |
| 11613808 |
Clean processes for boron carbon film deposition |
Jiheng Zhao, Abdul Aziz Khaja, Fang Ruan |
2023-03-28 |
$69,791,000 |
| 11600470 |
Targeted heat control systems |
Venkata Sharat Chandra Parimi, Satish Radhakrishnan, Xiaoquan Min, Sarah Michelle Bobek, Sungwon Ha +1 more |
2023-03-07 |
$32,704,000 |
| 11584994 |
Pedestal for substrate processing chambers |
Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Vinay Prabhakar, Kwangduk Douglas Lee, Sungwon Ha +1 more |
2023-02-21 |
$24,540,000 |
| 11560623 |
Methods of reducing chamber residues |
Liangfa Hu, Anjana M. Patel, Abdul Aziz Khaja, Viren Kalsekar, Vinay Prabhakar +5 more |
2023-01-24 |
$45,726,000 |
| 11469107 |
Highly etch selective amorphous carbon film |
Rajesh Prasad, Sarah Michelle Bobek, Kwangduk Douglas Lee, Harry Whitesell, Hidetaka Oshio +4 more |
2022-10-11 |
$43,708,000 |
| 11430641 |
Processing systems and methods to control process drift |
Vivien Chua, Zhijun Jiang, Fang Ruan, Diwakar Kedlaya |
2022-08-30 |
$41,861,000 |
| 11322352 |
Nitrogen-doped carbon hardmask films |
Xiaoquan Min, Lu Xu, Kwangduk Douglas Lee |
2022-05-03 |
$84,675,000 |
| 11031262 |
Loadlock integrated bevel etcher system |
Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Karthik Thimmavajjula Narasimha +12 more |
2021-06-08 |
$87,142,000 |