Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136549 | Plasma-enhanced chemical vapor deposition of carbon hard-mask | Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Bushra Afzal, Sungwon Ha, Vinay Prabhakar +3 more | 2024-11-05 |
| 11830706 | Heated pedestal design for improved heat transfer and temperature uniformity | Venkata Sharat Chandra Parimi, Zubin Huang, Jian Li, Satish Radhakrishnan, Rui Cheng +7 more | 2023-11-28 |
| 11560623 | Methods of reducing chamber residues | Liangfa Hu, Prashant Kumar Kulshreshtha, Anjana M. Patel, Abdul Aziz Khaja, Viren Kalsekar +5 more | 2023-01-24 |
| 10692542 | Coated slider to inhibit contamination accumulation | David J. Ellison | 2020-06-23 |
| 10522192 | Coated slider to inhibit contamination accumulation | David J. Ellison | 2019-12-31 |