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Multiple process semiconductor processing system |
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Semiconductor processing chamber architecture for higher throughput and faster transition time |
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Substrate pedestal for improved substrate processing |
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| 11699602 |
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| 11626303 |
Compliance components for semiconductor processing system |
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2023-04-11 |
| 11587773 |
Substrate pedestal for improved substrate processing |
Vinay Prabhakar, Venkata Sharat Chandra Parimi |
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| 11569072 |
RF grounding configuration for pedestals |
Satya THOKACHICHU, Edward P. Hammond, IV, Zheng John Ye, Abdul Aziz Khaja, Vinay Prabhakar |
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| 11560623 |
Methods of reducing chamber residues |
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| 11515176 |
Thermally controlled lid stack components |
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| 10923334 |
Selective deposition of hardmask |
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2021-02-16 |
