Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266550 | Multiple process semiconductor processing system | Nitin Pathak, Vinay Prabhakar, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez | 2025-04-01 |
| 12136549 | Plasma-enhanced chemical vapor deposition of carbon hard-mask | Byung Seok KWON, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Bushra Afzal, Sungwon Ha +3 more | 2024-11-05 |
| 12062526 | Semiconductor processing chamber architecture for higher throughput and faster transition time | — | 2024-08-13 |
| 11984305 | Substrate pedestal for improved substrate processing | Vinay Prabhakar, Venkata Sharat Chandra Parimi | 2024-05-14 |
| 11699602 | Substrate support assemblies and components | Jian Li, Edward P. Hammond, IV, Vidyadharan Srinivasa Murthy Bangalore, Juan Carlos Rocha-Alvarez | 2023-07-11 |
| 11626303 | Compliance components for semiconductor processing system | — | 2023-04-11 |
| 11587773 | Substrate pedestal for improved substrate processing | Vinay Prabhakar, Venkata Sharat Chandra Parimi | 2023-02-21 |
| 11569072 | RF grounding configuration for pedestals | Satya THOKACHICHU, Edward P. Hammond, IV, Zheng John Ye, Abdul Aziz Khaja, Vinay Prabhakar | 2023-01-31 |
| 11560623 | Methods of reducing chamber residues | Liangfa Hu, Prashant Kumar Kulshreshtha, Anjana M. Patel, Abdul Aziz Khaja, Vinay Prabhakar +5 more | 2023-01-24 |
| 11515176 | Thermally controlled lid stack components | Siva Chandrasekar, Satish Radhakrishnan, Rajath Kumar Lakkenahalli Hiriyannaiah, Vinay Prabhakar | 2022-11-29 |
| 10923334 | Selective deposition of hardmask | Satya THOKACHICHU, Edward P. Hammond, IV, Zheng John Ye, Sarah Michelle Bobek, Abdul Aziz Khaja +4 more | 2021-02-16 |