Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347653 | Uniform in situ cleaning and deposition | Saket Rathi, Tuan Nguyen, Amit Kumar BANSAL, Yuxing Zhang, Badri Narayan Ramamurthi +2 more | 2025-07-01 |
| 12266550 | Multiple process semiconductor processing system | Vinay Prabhakar, Badri Narayan Ramamurthi, Viren Kalsekar, Juan Carlos Rocha-Alvarez | 2025-04-01 |
| 12255054 | Methods to eliminate of deposition on wafer bevel and backside | Venkata Sharat Chandra Parimi, Zubin Huang, Manjunath Veerappa Chobari Patil, Yi Yang, Badri Narayan Ramamurthi +3 more | 2025-03-18 |
| 12183553 | Baffle implementation for improving bottom purge gas flow uniformity | Kartik Shah, Amit Kumar BANSAL, Tuan Nguyen, Juan Carlos Rocha, David Blahnik | 2024-12-31 |
| 12012653 | Cleaning assemblies for substrate processing chambers | Yuxing Zhang, Tuan Nguyen, Amit Kumar BANSAL, Saket Rathi, Thomas Rubio +3 more | 2024-06-18 |
| 11952663 | Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater | Tuan Nguyen, Amit Kumar BANSAL, Badri Narayan Ramamurthi, Thomas Rubio, Juan Carlos Rocha-Alvarez | 2024-04-09 |
| 11952660 | Semiconductor processing chambers and methods for cleaning the same | Yuxing Zhang, Tuan Nguyen, Kalyanjit Ghosh, Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez | 2024-04-09 |
| 11827980 | Isolator apparatus and methods for substrate processing chambers | Amit Kumar BANSAL, Tuan Nguyen, Thomas Rubio, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez | 2023-11-28 |
| 11742185 | Uniform in situ cleaning and deposition | Saket Rathi, Tuan Nguyen, Amit Kumar BANSAL, Yuxing Zhang, Badri Narayan Ramamurthi +2 more | 2023-08-29 |
| 11643725 | Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater | Tuan Nguyen, Amit Kumar BANSAL, Badri Narayan Ramamurthi, Thomas Rubio, Juan Carlos Rocha-Alvarez | 2023-05-09 |
| 11492705 | Isolator apparatus and methods for substrate processing chambers | Amit Kumar BANSAL, Tuan Nguyen, Thomas Rubio, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez | 2022-11-08 |
| 11049699 | Gas box for CVD chamber | Tejas Ulavi, Amit Kumar BANSAL, Ajit Balakrishna | 2021-06-29 |
| 10269614 | Susceptor design to reduce edge thermal peak | Schubert S. Chu, Kartik Shah, Anhthu Ngo, Karthik Ramanathan, Nyi O. Myo +8 more | 2019-04-23 |