Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12012653 | Cleaning assemblies for substrate processing chambers | Yuxing Zhang, Tuan Nguyen, Amit Kumar BANSAL, Nitin Pathak, Saket Rathi +3 more | 2024-06-18 |
| 11952663 | Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater | Nitin Pathak, Tuan Nguyen, Amit Kumar BANSAL, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez | 2024-04-09 |
| 11827980 | Isolator apparatus and methods for substrate processing chambers | Nitin Pathak, Amit Kumar BANSAL, Tuan Nguyen, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez | 2023-11-28 |
| 11643725 | Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater | Nitin Pathak, Tuan Nguyen, Amit Kumar BANSAL, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez | 2023-05-09 |
| 11492705 | Isolator apparatus and methods for substrate processing chambers | Nitin Pathak, Amit Kumar BANSAL, Tuan Nguyen, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez | 2022-11-08 |
| 8341059 | System, method and apparatus for creating and executing inter-exchange spread instruments | — | 2012-12-25 |