Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347653 | Uniform in situ cleaning and deposition | Tuan Nguyen, Amit Kumar BANSAL, Yuxing Zhang, Badri Narayan Ramamurthi, Nitin Pathak +2 more | 2025-07-01 |
| 12012653 | Cleaning assemblies for substrate processing chambers | Yuxing Zhang, Tuan Nguyen, Amit Kumar BANSAL, Nitin Pathak, Thomas Rubio +3 more | 2024-06-18 |
| 11961756 | Vented susceptor | Uday Kiran Rokkam, Sam Kim, Dakai Bian | 2024-04-16 |
| 11946137 | Runout and wobble measurement fixtures | Aniket PATIL, Sam Kim, Shiva K.T. Rajavelu Muralidhar | 2024-04-02 |
| 11764101 | Susceptor for semiconductor substrate processing | Shiva K.T. Rajavelu Muralidhar, Siyao Luan, Alexandros T. Demos, Xing Lin | 2023-09-19 |
| 11742185 | Uniform in situ cleaning and deposition | Tuan Nguyen, Amit Kumar BANSAL, Yuxing Zhang, Badri Narayan Ramamurthi, Nitin Pathak +2 more | 2023-08-29 |
| 11697877 | High temperature face plate for deposition application | Amit Kumar BANSAL, Tuan Nguyen | 2023-07-11 |
| D965524 | Susceptor support | Aniket PATIL, John DiSanto, Sam Kim | 2022-10-04 |
| D965044 | Susceptor shaft | Aniket PATIL, Sam Kim, John DiSanto | 2022-09-27 |
| D958764 | Higher temperature vented susceptor | Uday Kiran Rokkam, Sam Kim, Dakai Bian | 2022-07-26 |
| 11242600 | High temperature face plate for deposition application | Amit Kumar BANSAL, Tuan Nguyen | 2022-02-08 |
| D920936 | Higher temperature vented susceptor | Uday Kiran Rokkam, Sam Kim, Dakai Bian | 2021-06-01 |
| D914620 | Vented susceptor | Uday Kiran Rokkam, Sam Kim, Dakai Bian | 2021-03-30 |
| 10945313 | Methods and apparatus for a microwave batch curing process | Ananthkrishna Jupudi, Mukund Sundararajan, Manjunath H. Venkataswamappa | 2021-03-09 |
| 10373860 | Batch processing apparatus | Mukund Sundararajan, Ananthkrishna Jupudi, Manjunatha Koppa | 2019-08-06 |