| 12417933 |
Wafer far edge temperature measurement system with lamp bank alignment |
Rutvij Naik, Shujin Huang, Junwei Su |
2025-09-16 |
|
| 12394659 |
Susceptors with film deposition control features |
Shujin Huang, Junwei Su, Alexandros T. Demos, Rutvij Naik, Wentao Wang +6 more |
2025-08-19 |
|
| 12378665 |
High temperature coatings for a preclean and etch apparatus and related methods |
Peipei Gao, Alexandros T. Demos, Chuang Wei, Wentao Wang, Mingyang Ma +1 more |
2025-08-05 |
|
| 12354893 |
Fixture and method for determining position of a target in a reaction chamber |
Siyao Luan, Peipei Gao, Alexandros T. Demos, Kishor Patil |
2025-07-08 |
|
| 12272527 |
Apparatus for use with hydrogen radicals and method of using same |
Chuang Wei, Wentao Wang, Peipei Gao, Fei Wang, Bubesh Babu Jotheeswaran |
2025-04-08 |
|
| D1067204 |
Susceptor |
Shujin Huang, Junwei Su, Wentao Wang |
2025-03-18 |
|
| 12234554 |
Semiconductor deposition reactor and components for reduced quartz devitrification |
Rutvij Naik, Junwei Su, Wentao Wang, Chuqin Zhou |
2025-02-25 |
|
| 12112938 |
Semiconductor processing preclean methods and apparatus |
Chuang Wei, Aditya Chaudhury, Prahlad Kulkarni, Xiaoda Sun, Woo-Jung Shin +7 more |
2024-10-08 |
|
| D1031676 |
Combined susceptor, support, and lift system |
Peipei Gao, Wentao Wang, Han Ye, Ion Hong Chao, Siyao Luan +2 more |
2024-06-18 |
|
| 12006572 |
Reactor system including a gas distribution assembly for use with activated species and method of using same |
Peipei Gao, Prajwal Nagaraj, Mingyang Ma, Wentao Wang, Ion Hong Chao +3 more |
2024-06-11 |
|
| D1030687 |
Susceptor |
Shujin Huang, Junwei Su, Wentao Wang |
2024-06-11 |
|
| D1028913 |
Semiconductor deposition reactor ring |
Rutvij Naik, Junwei Su, Wentao Wang, Chuqin Zhou |
2024-05-28 |
|
| 11764101 |
Susceptor for semiconductor substrate processing |
Saket Rathi, Shiva K.T. Rajavelu Muralidhar, Siyao Luan, Alexandros T. Demos |
2023-09-19 |
|
| 11053591 |
Multi-port gas injection system and reactor system including same |
Mingyang Ma, Junwei Su, Alexandros T. Demos, Sam Yong Kim, Gregory Bartlett |
2021-07-06 |
|
| 10971389 |
Multi-zone pedestal for plasma processing |
Bozhi Yang, Jianhua Zhou, Dale R. DuBois, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan |
2021-04-06 |
$63,491,000 |
| 10950477 |
Ceramic heater and esc with enhanced wafer edge performance |
Jianhua Zhou, Zheng John Ye, Jian J. Chen, Juan Carlos Rocha-Alvarez |
2021-03-16 |
$56,717,000 |
| 10879041 |
Method and apparatus of achieving high input impedance without using ferrite materials for RF filter applications in plasma chambers |
Zheng John Ye, Abdul Aziz Khaja, Amit Kumar BANSAL, Kwangduk Douglas Lee, Jianhua Zhou +2 more |
2020-12-29 |
$47,583,000 |
| 10811301 |
Dual-zone heater for plasma processing |
Jianhua Zhou, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan |
2020-10-20 |
$40,793,000 |
| 10770328 |
Substrate support with symmetrical feed structure |
Douglas A. Buchberger, Jr., Xiaoping Zhou, Andrew Nguyen, Anchel Sheyner |
2020-09-08 |
$22,964,000 |
| 10692703 |
Ceramic heater with enhanced RF power delivery |
Jianhua Zhou, Ningli Liu, Juan Carlos Rocha-Alvarez |
2020-06-23 |
$29,749,000 |
| 10497606 |
Dual-zone heater for plasma processing |
Jianhua Zhou, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan |
2019-12-03 |
$22,017,000 |
| 10403535 |
Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system |
Zheng John Ye, Jay D. Pinson, II, Hiroji Hanawa, Jianhua Zhou, Ren-Guan Duan +11 more |
2019-09-03 |
$20,988,000 |
| 10096494 |
Substrate support with symmetrical feed structure |
Douglas A. Buchberger, Jr., Xiaoping Zhou, Andrew Nguyen, Anchel Sheyner |
2018-10-09 |
$16,738,000 |
| 10090187 |
Multi-zone pedestal for plasma processing |
Bozhi Yang, Jianhua Zhou, Dale R. DuBois, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan |
2018-10-02 |
$29,675,000 |
| 9948214 |
High temperature electrostatic chuck with real-time heat zone regulating capability |
Dmitry Lubomirsky, Jennifer Y. Sun, Sehn Thach, Michael D. Willwerth, Konstantin Makhratchev |
2018-04-17 |
$32,881,000 |
