Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9725806 | Multi-zone pedestal for plasma processing | Bozhi Yang, Jianhua Zhou, Dale R. DuBois, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2017-08-08 |
| 9123762 | Substrate support with symmetrical feed structure | Douglas A. Buchberger, Jr., Xiaoping Zhou, Andrew Nguyen, Anchel Sheyner | 2015-09-01 |
| 8982530 | Methods and apparatus toward preventing ESC bonding adhesive erosion | Jennifer Y. Sun, Sumanth Banda | 2015-03-17 |
| 8633423 | Methods and apparatus for controlling substrate temperature in a process chamber | Douglas A. Buchberger, Jr., Xiaoping Zhou, Valentin N. Todorow, Andrew Nguyen, Anchel Sheyner | 2014-01-21 |
| 8492980 | Methods for calibrating RF power applied to a plurality of RF coils in a plasma processing system | Samer Banna, Valentin N. Todorow, TSE-CHIANG WANG | 2013-07-23 |