| 12397330 |
Condition selectable backside gas |
Stephen Prouty, Martin Perez-Guzman, Rajinder Dhindsa, Alvaro Garcia de Gorordo |
2025-08-26 |
| 12094716 |
Chambers and coatings for reducing backside damage |
Leonard Tedeschi, Kartik Ramaswamy, Benjamin Schwarz, Changgong Wang, Vahid Firouzdor +1 more |
2024-09-17 |
| 12033881 |
Reduced localized force in electrostatic chucking |
Vladimir Knyazik, Stephen Prouty |
2024-07-09 |
| 11666952 |
Condition selectable backside gas |
Stephen Prouty, Martin Perez-Guzman, Rajinder Dhindsa, Alvaro Garcia de Gorordo |
2023-06-06 |
| 11651987 |
Substrate support carrier with improved bond layer protection |
Stephen Prouty, Andreas Schmid, Jonathan Simmons |
2023-05-16 |
| 11380572 |
Substrate support carrier with improved bond layer protection |
Stephen Prouty, Andreas Schmid, Jonathan Simmons |
2022-07-05 |
| 11130142 |
Showerhead having a detachable gas distribution plate |
Dmitry Lubomirsky, Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye +1 more |
2021-09-28 |
| 10975469 |
Plasma resistant coating of porous body by atomic layer deposition |
Vahid Firouzdor, Rajinder Dhindsa, Daniel Sang Byun, Dana Marie Lovell |
2021-04-13 |
| 10899892 |
Copolymerized high temperature bonding component |
Jennifer Y. Sun |
2021-01-26 |
| 10847402 |
Bond protection around porous plugs |
Wendell Glenn Boyd, Jr. |
2020-11-24 |
| 10774436 |
High purity aluminum top coat on substrate |
Jennifer Y. Sun |
2020-09-15 |
| 10745805 |
Plasma resistant coating of porous body by atomic layer deposition |
Vahid Firouzdor, Rajinder Dhindsa, Daniel Sang Byun, Dana Marie Lovell |
2020-08-18 |
| 10625277 |
Showerhead having a detachable gas distribution plate |
Dmitry Lubomirsky, Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye +1 more |
2020-04-21 |
| 10570257 |
Copolymerized high temperature bonding component |
Jennifer Y. Sun |
2020-02-25 |
| 9850591 |
High purity aluminum top coat on substrate |
Jennifer Y. Sun |
2017-12-26 |
| 9610591 |
Showerhead having a detachable gas distribution plate |
Dmitry Lubomirsky, Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye +1 more |
2017-04-04 |
| 9597734 |
Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof |
Jennifer Y. Sun, Ren-Guan Duan |
2017-03-21 |
| 9447365 |
Enhanced cleaning process of chamber used plasma spray coating without damaging coating |
Jennifer Y. Sun |
2016-09-20 |
| 9358702 |
Temperature management of aluminium nitride electrostatic chuck |
Jennifer Y. Sun, Douglas A. Buchberger, Jr., Shane C. Nevil |
2016-06-07 |
| 8982530 |
Methods and apparatus toward preventing ESC bonding adhesive erosion |
Xing Lin, Jennifer Y. Sun |
2015-03-17 |
| 8916021 |
Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof |
Jennifer Y. Sun, Ren-Guan Duan |
2014-12-23 |
