Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854425 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Yashaswini B. Pattar +7 more | 2020-12-01 |
| 9358702 | Temperature management of aluminium nitride electrostatic chuck | Sumanth Banda, Jennifer Y. Sun, Douglas A. Buchberger, Jr. | 2016-06-07 |
| 9338871 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Yashaswini B. Pattar +7 more | 2016-05-10 |
| 9248509 | Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity | Hamid Tavassoli, Surajit Kumar, Kallol Bera, Xiaoping Zhou, Douglas A. Buchberger, Jr. | 2016-02-02 |
| 9214315 | Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow | Fernando Silveira, Hamid Tavassoli, Xiaoping Zhou, Douglas A. Buchberger, Jr., Brad L. Mays +5 more | 2015-12-15 |
| 8916793 | Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow | Fernando Silveira, Hamid Tavassoli, Xiaoping Zhou, Douglas A. Buchberger, Jr., Brad L. Mays +5 more | 2014-12-23 |
| 8822876 | Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity | Hamid Tavassoli, Surajit Kumar, Kallol Bera, Xiaoping Zhou, Douglas A. Buchberger, Jr. | 2014-09-02 |
| 8629370 | Assembly for delivering RF power and DC voltage to a plasma processing chamber | Hamid Tavassoli, Surajit Kumar, Douglas A. Buchberger, Jr. | 2014-01-14 |
| 8596336 | Substrate support temperature control | Richard Fovell, Paul Brillhart, Sang In Yi, Anisul Khan, Jivko Dinev | 2013-12-03 |