Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11615973 | Substrate carrier using a proportional thermal fluid delivery system | Phillip Criminale, Justin Phi, Dan Marohl, Brad L. Mays | 2023-03-28 |
| 11171030 | Methods and apparatus for dechucking wafers | Hamid Noorbakhsh, Anwar Husain, Haitao Wang | 2021-11-09 |
| 10930540 | Electrostatic chuck assembly having a dielectric filler | Kartik Ramaswamy, Anwar Husain, Haitao Wang, Evans Lee, Jaeyong Cho +3 more | 2021-02-23 |
| 10854427 | Radio frequency (RF) pulsing impedance tuning with multiplier mode | Katsumasa Kawasaki, Justin Phi, Kartik Ramaswamy, Daisuke Shimizu | 2020-12-01 |
| 10854425 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Chunlei Zhang, Yashaswini B. Pattar, Duy D. Nguyen +7 more | 2020-12-01 |
| 10784132 | Method and apparatus for de-chucking a workpiece using a swing voltage sequence | Haitao Wang, Wonseok Lee, Chunlei Zhang, Kartik Ramaswamy | 2020-09-22 |
| 10745807 | Showerhead with reduced backside plasma ignition | Haitao Wang, Hamid Noorbakhsh, Chunlei Zhang, Kartik Ramaswamy, Roland Smith +1 more | 2020-08-18 |
| 10546731 | Method, apparatus and system for wafer dechucking using dynamic voltage sweeping | Haitao Wang, Michael G. Chafin, Kartik Ramaswamy, Yue Guo, Valentin N. Todorow +3 more | 2020-01-28 |
| 10504765 | Electrostatic chuck assembly having a dielectric filler | Kartik Ramaswamy, Anwar Husain, Haitao Wang, Evans Lee, Jaeyong Cho +3 more | 2019-12-10 |
| 10490429 | Substrate carrier using a proportional thermal fluid delivery system | Phillip Criminale, Justin Phi, Dan Marohl, Brad L. Mays | 2019-11-26 |
| 10468233 | RF power delivery regulation for processing substrates | Katsumasa Kawasaki, Justin Phi | 2019-11-05 |
| 10378108 | Showerhead with reduced backside plasma ignition | Haitao Wang, Hamid Noorbakhsh, Chunlei Zhang, Kartik Ramaswamy, Roland Smith +1 more | 2019-08-13 |
| 10242893 | Method and apparatus for de-chucking a workpiece using a swing voltage sequence | Haitao Wang, Wonseok Lee, Chunlei Zhang, Kartik Ramaswamy | 2019-03-26 |
| 9909213 | Recursive pumping for symmetrical gas exhaust to control critical dimension uniformity in plasma reactors | Hamid Noorbakhsh, Jong Mun Kim, Jason Della Rosa, Ajit Balakrishna | 2018-03-06 |
| 9788405 | RF power delivery with approximated saw tooth wave pulsing | Katsumasa Kawasaki, Justin Phi, Daisuke Shimizu | 2017-10-10 |
| 9741539 | RF power delivery regulation for processing substrates | Katsumasa Kawasaki, Justin Phi | 2017-08-22 |
| 9639097 | Component temperature control by coolant flow control and heater duty cycle control | Chetan Mahadeswaraswamy, Kartik Ramaswamy, Bryan Liao, Duy D. Nguyen, Hamid Noorbakhsh +1 more | 2017-05-02 |
| 9338871 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Chunlei Zhang, Yashaswini B. Pattar, Duy D. Nguyen +7 more | 2016-05-10 |
| 9269587 | Methods for etching materials using synchronized RF pulses | Daisuke Shimizu, Jong Mun Kim, Katsumasa Kawasaki | 2016-02-23 |
| 8962488 | Synchronized radio frequency pulsing for plasma etching | Bryan Liao, Katsumasa Kawasaki, Yashaswini B. Pattar, Duy D. Nguyen, Kartik Ramaswamy +3 more | 2015-02-24 |
| 8880227 | Component temperature control by coolant flow control and heater duty cycle control | Chetan Mahadeswaraswamy, Kartik Ramaswamy, Bryan Liao, Duy D. Nguyen, Hamid Noorbakhsh +1 more | 2014-11-04 |
| 8513889 | Methods and apparatus for tuning matching networks | Chunlei Zhang, Andrey Semenin, Kartik Ramaswamy, James P. Cruse, Bryan Liao | 2013-08-20 |
| 8404598 | Synchronized radio frequency pulsing for plasma etching | Bryan Liao, Katsumasa Kawasaki, Yashaswini B. Pattar, Duy D. Nguyen, Kartik Ramaswamy +3 more | 2013-03-26 |
| 6898065 | Method and apparatus for operating an electrostatic chuck in a semiconductor substrate processing system | Brad L. Mays, Tetsuya Ishikawa | 2005-05-24 |
| 5721737 | Serial transmission system for controlling a network of I/O devices | Bahman Radjabi, Mary Nagata | 1998-02-24 |