Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854425 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Duy D. Nguyen +7 more | 2020-12-01 |
| 9338871 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Duy D. Nguyen +7 more | 2016-05-10 |
| 9214315 | Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow | Fernando Silveira, Hamid Tavassoli, Xiaoping Zhou, Shane C. Nevil, Douglas A. Buchberger, Jr. +5 more | 2015-12-15 |
| 8962488 | Synchronized radio frequency pulsing for plasma etching | Bryan Liao, Katsumasa Kawasaki, Sergio Fukuda Shoji, Duy D. Nguyen, Kartik Ramaswamy +3 more | 2015-02-24 |
| 8916793 | Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow | Fernando Silveira, Hamid Tavassoli, Xiaoping Zhou, Shane C. Nevil, Douglas A. Buchberger, Jr. +5 more | 2014-12-23 |
| 8404598 | Synchronized radio frequency pulsing for plasma etching | Bryan Liao, Katsumasa Kawasaki, Sergio Fukuda Shoji, Duy D. Nguyen, Kartik Ramaswamy +3 more | 2013-03-26 |