Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12046449 | Methods and apparatus for processing a substrate | Yue Guo, Kartik Ramaswamy, Yang Yang, Nicolas Bright | 2024-07-23 |
| 11694876 | Apparatus and method for delivering a plurality of waveform signals during plasma processing | James Rogers | 2023-07-04 |
| 11164723 | Methods and apparatus for etching semiconductor structures | Daisuke Shimizu, Taiki Hatakeyama, Sean S. Kang, Chunlei Zhang | 2021-11-02 |
| 10930471 | Methods and apparatus for etching semiconductor structures | Daisuke Shimizu, Taiki Hatakeyama, Sean S. Kang, Chunlei Zhang | 2021-02-23 |
| 10854427 | Radio frequency (RF) pulsing impedance tuning with multiplier mode | Justin Phi, Kartik Ramaswamy, Sergio Fukuda Shoji, Daisuke Shimizu | 2020-12-01 |
| 10790126 | Smart RF pulsing tuning using variable frequency generators | — | 2020-09-29 |
| 10593518 | Methods and apparatus for etching semiconductor structures | Daisuke Shimizu, Taiki Hatakeyama, Sean S. Kang, Chunlei Zhang | 2020-03-17 |
| 10468233 | RF power delivery regulation for processing substrates | Justin Phi, Sergio Fukuda Shoji | 2019-11-05 |
| 10424467 | Smart RF pulsing tuning using variable frequency generators | — | 2019-09-24 |
| 9872373 | Smart multi-level RF pulsing methods | Daisuke Shimizu, Wonseok Lee, Li Ling, Justin Phi, Kevin Choi | 2018-01-16 |
| 9788405 | RF power delivery with approximated saw tooth wave pulsing | Sergio Fukuda Shoji, Justin Phi, Daisuke Shimizu | 2017-10-10 |
| 9754767 | RF pulse reflection reduction for processing substrates | — | 2017-09-05 |
| 9741539 | RF power delivery regulation for processing substrates | Justin Phi, Sergio Fukuda Shoji | 2017-08-22 |
| 9614524 | Automatic impedance tuning with RF dual level pulsing | — | 2017-04-04 |
| 9269587 | Methods for etching materials using synchronized RF pulses | Daisuke Shimizu, Jong Mun Kim, Sergio Fukuda Shoji | 2016-02-23 |
| 8962488 | Synchronized radio frequency pulsing for plasma etching | Bryan Liao, Yashaswini B. Pattar, Sergio Fukuda Shoji, Duy D. Nguyen, Kartik Ramaswamy +3 more | 2015-02-24 |
| 8404598 | Synchronized radio frequency pulsing for plasma etching | Bryan Liao, Yashaswini B. Pattar, Sergio Fukuda Shoji, Duy D. Nguyen, Kartik Ramaswamy +3 more | 2013-03-26 |