Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373877 | Methods and apparatus for in-situ protection liners for high aspect ratio reactive ion etching | Daisuke Shimizu, Shinichi Koseki, Sean S. Kang, Jairaj Payyapilly, Hikaru Watanabe | 2022-06-28 |
| 11164723 | Methods and apparatus for etching semiconductor structures | Daisuke Shimizu, Sean S. Kang, Katsumasa Kawasaki, Chunlei Zhang | 2021-11-02 |
| 10930471 | Methods and apparatus for etching semiconductor structures | Daisuke Shimizu, Sean S. Kang, Katsumasa Kawasaki, Chunlei Zhang | 2021-02-23 |
| 10593518 | Methods and apparatus for etching semiconductor structures | Daisuke Shimizu, Sean S. Kang, Katsumasa Kawasaki, Chunlei Zhang | 2020-03-17 |