Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12046522 | Endpoint detection in low open area and/or high aspect ratio etch applications | Lei Lian, Quentin Ernie Walker, Zefang WANG | 2024-07-23 |
| 11373877 | Methods and apparatus for in-situ protection liners for high aspect ratio reactive ion etching | Daisuke Shimizu, Taiki Hatakeyama, Sean S. Kang, Jairaj Payyapilly, Hikaru Watanabe | 2022-06-28 |
| 9425058 | Simplified litho-etch-litho-etch process | Hun Sang Kim, Jinhan Choi | 2016-08-23 |
| 8293656 | Selective self-aligned double patterning of regions in an integrated circuit device | Hun Sang Kim, Hyungje Woo, Eda Tuncel, Chung Liu | 2012-10-23 |