Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12253476 | Multi-level RF pulse monitoring and RF pulsing parameter optimization at a manufacturing system | Dermot Cantwell, Serghei Malkov, Jatinder Kumar | 2025-03-18 |
| 12046522 | Endpoint detection in low open area and/or high aspect ratio etch applications | Lei Lian, Zefang WANG, Shinichi Koseki | 2024-07-23 |
| 11874234 | Multi-level RF pulse monitoring and RF pulsing parameter optimization at a manufacturing system | Dermot Cantwell, Serghei Malkov, Jatinder Kumar | 2024-01-16 |
| 11585764 | Multi-level RF pulse monitoring and RF pulsing parameter optimization at a manufacturing system | Dermot Cantwell, Serghei Malkov, Jatinder Kumar | 2023-02-21 |
| 9200950 | Pulsed plasma monitoring using optical sensor and a signal analyzer forming a mean waveform | Lei Lian, Dermot Cantwell | 2015-12-01 |
| 8089046 | Method and apparatus for calibrating mass flow controllers | Matthew F. Davis, Thorsten Lill | 2012-01-03 |
| 7393459 | Method for automatic determination of substrates states in plasma processing chambers | Matthew F. Davis, Lei Lian | 2008-07-01 |