Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322618 | Adaptive control of variability in device performance in advanced semiconductor processes | Samer Banna, Lior ENGEL | 2025-06-03 |
| 12253476 | Multi-level RF pulse monitoring and RF pulsing parameter optimization at a manufacturing system | Quentin Ernie Walker, Serghei Malkov, Jatinder Kumar | 2025-03-18 |
| 12158735 | Process recipe creation and matching using feature models | Taehun Kim | 2024-12-03 |
| 12131269 | Time-series fault detection, fault classification, and transition analysis using a k-nearest-neighbor and logistic regression approach | — | 2024-10-29 |
| 12074073 | Prescriptive analytics in highly collinear response space | Sidharth Bhatia, Jie Feng | 2024-08-27 |
| 11947888 | Semiconductor processing tools with improved performance by use of hybrid learning models | Stephen Moffatt, Sheldon R. Normand | 2024-04-02 |
| 11874234 | Multi-level RF pulse monitoring and RF pulsing parameter optimization at a manufacturing system | Quentin Ernie Walker, Serghei Malkov, Jatinder Kumar | 2024-01-16 |
| 11860591 | Process recipe creation and matching using feature models | Taehun Kim | 2024-01-02 |
| 11829873 | Predictive modeling of a manufacturing process using a set of trained inverted models | Sidharth Bhatia, Serghei Malkov, Jie Feng | 2023-11-28 |
| 11586794 | Semiconductor processing tools with improved performance by use of hybrid learning models | Stephen Moffatt, Sheldon R. Normand | 2023-02-21 |
| 11585764 | Multi-level RF pulse monitoring and RF pulsing parameter optimization at a manufacturing system | Quentin Ernie Walker, Serghei Malkov, Jatinder Kumar | 2023-02-21 |
| 11328964 | Prescriptive analytics in highly collinear response space | Sidharth Bhatia, Jie Feng | 2022-05-10 |
| 11275975 | Fault detection classification | — | 2022-03-15 |
| 10930531 | Adaptive control of wafer-to-wafer variability in device performance in advanced semiconductor processes | Samer Banna, Lior ENGEL | 2021-02-23 |
| 10929586 | Predictive spatial digital design of experiment for advanced semiconductor process optimization and control | Samer Banna, Waheb Bishara | 2021-02-23 |
| 10657214 | Predictive spatial digital design of experiment for advanced semiconductor process optimization and control | Samer Banna, Waheb Bishara | 2020-05-19 |
| 10565513 | Time-series fault detection, fault classification, and transition analysis using a K-nearest-neighbor and logistic regression approach | — | 2020-02-18 |
| 10242472 | Trend dynamic sensor imaging using contour maps to visualize multiple trend data sets in a single view | Serguei Platonov | 2019-03-26 |
| 9934351 | Wafer point by point analysis and data presentation | Sathyendra Ghantasala | 2018-04-03 |
| 9910430 | K-nearest neighbor-based method and system to provide multi-variate analysis on tool process data | Thorsten Kril, Aleksey Yanovich | 2018-03-06 |
| 9881398 | Trend dynamic sensor imaging using contour maps to visualize multiple trend data sets in a single view | Serguei Platonov | 2018-01-30 |
| 9852371 | Using radial basis function networks and hyper-cubes for excursion classification in semi-conductor processing equipment | — | 2017-12-26 |
| 9262726 | Using radial basis function networks and hyper-cubes for excursion classification in semi-conductor processing equipment | — | 2016-02-16 |
| 9200950 | Pulsed plasma monitoring using optical sensor and a signal analyzer forming a mean waveform | Lei Lian, Quentin Ernie Walker | 2015-12-01 |
| 8721798 | Methods for processing substrates in process systems having shared resources | James P. Cruse, Ming Xu, Charles Hardy, Benjamin Schwarz, Kenneth S. Collins +3 more | 2014-05-13 |