| 11668553 |
Apparatus and method for controlling edge ring variation |
Leonid Dorf, Evgeny Kamenetskiy, Peter Muraoka, Denis M. Koosau, Rajinder Dhindsa +1 more |
2023-06-06 |
| 11209478 |
Pulse system verification |
Hyun-Ho Doh |
2021-12-28 |
| 10896833 |
Methods and apparatus for detecting an endpoint of a seasoning process |
Subrahmanyam Venkata Rama Kommisetti, Eda Tuncel, Shayne Smith, Liming Zhang, Ryan Patz |
2021-01-19 |
| 10607815 |
Methods and apparatuses for plasma chamber matching and fault identification |
Hyun-Ho Doh, Vijayakumar C. Venugopal |
2020-03-31 |
| 10553397 |
Processing chamber hardware fault detection using spectral radio frequency analysis |
Vijayakumar C. Venugopal, Hyun-Ho Doh |
2020-02-04 |
| 10283320 |
Processing chamber hardware fault detection using spectral radio frequency analysis |
Vijayakumar C. Venugopal, Hyun-Ho Doh |
2019-05-07 |
| 9934351 |
Wafer point by point analysis and data presentation |
Dermot Cantwell |
2018-04-03 |
