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Sliding ring for an interlocking process kit for a substrate processing chamber |
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| D1042374 |
Support pipe for an interlocking process kit for a substrate processing chamber |
Sahiti Nallagonda, Jonathan Simmons, Xinwei Huang, Andreas Schmid |
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| 11935773 |
Calibration jig and calibration method |
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Apparatus and method for controlling edge ring variation |
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RF impedance model based fault detection |
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RF impedance model based fault detection |
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Methods for stabilizing contact surfaces of electrostatic chucks |
Chris Kimball, Tom Stevenson |
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