Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1055006 | Support ring for an interlocking process kit for a substrate processing chamber | Sahiti Nallagonda, Xinwei Huang, Peter Muraoka, Andreas Schmid | 2024-12-24 |
| D1042373 | Sliding ring for an interlocking process kit for a substrate processing chamber | Sahiti Nallagonda, Xinwei Huang, Peter Muraoka, Andreas Schmid | 2024-09-17 |
| D1042374 | Support pipe for an interlocking process kit for a substrate processing chamber | Sahiti Nallagonda, Xinwei Huang, Peter Muraoka, Andreas Schmid | 2024-09-17 |
| 11651987 | Substrate support carrier with improved bond layer protection | Stephen Prouty, Andreas Schmid, Sumanth Banda | 2023-05-16 |
| 11380572 | Substrate support carrier with improved bond layer protection | Stephen Prouty, Andreas Schmid, Sumanth Banda | 2022-07-05 |
| 10867829 | Ceramic hybrid insulator plate | Dana Marie Lovell | 2020-12-15 |
| 10698490 | Haptic feedback device, method and system | — | 2020-06-30 |
| 8316867 | Electrostatic chuck cleaning during semiconductor substrate processing | Dean Jennings, Majeed A. Foad | 2012-11-27 |