| D1055006 |
Support ring for an interlocking process kit for a substrate processing chamber |
Sahiti Nallagonda, Xinwei Huang, Peter Muraoka, Andreas Schmid |
2024-12-24 |
| D1042373 |
Sliding ring for an interlocking process kit for a substrate processing chamber |
Sahiti Nallagonda, Xinwei Huang, Peter Muraoka, Andreas Schmid |
2024-09-17 |
| D1042374 |
Support pipe for an interlocking process kit for a substrate processing chamber |
Sahiti Nallagonda, Xinwei Huang, Peter Muraoka, Andreas Schmid |
2024-09-17 |
| 11651987 |
Substrate support carrier with improved bond layer protection |
Stephen Prouty, Andreas Schmid, Sumanth Banda |
2023-05-16 |
| 11380572 |
Substrate support carrier with improved bond layer protection |
Stephen Prouty, Andreas Schmid, Sumanth Banda |
2022-07-05 |
| 10867829 |
Ceramic hybrid insulator plate |
Dana Marie Lovell |
2020-12-15 |
| 10698490 |
Haptic feedback device, method and system |
— |
2020-06-30 |
| 8316867 |
Electrostatic chuck cleaning during semiconductor substrate processing |
Dean Jennings, Majeed A. Foad |
2012-11-27 |
